Dr. Xiaomei He
at Changcheng Institute of Metrology and Measurement
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 19 November 2021 Paper
Proceedings Volume 12059, 120591P (2021) https://doi.org/10.1117/12.2613428
KEYWORDS: Nanolithography, Optical spheres, Standards development, Precision measurement, Head, Ruby, Design for manufacturability, Aluminum, Surface finishing, Spherical lenses

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