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Xiaoqian Zhou
at Luoyang Optoelectro Technology Development Ctr
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Publications (1)
Proceedings Article | 27 March 2022 Paper
Optimization of corrosion process after diffusion in InSb
Xiaoqian Zhou, Peng Wei, Haizhen Wang, Yanqiu Lyu
Proceedings Volume 12169, 1216984 (2022) https://doi.org/10.1117/12.2625097
KEYWORDS: Corrosion, Semiconducting wafers, Diffusion, Crystals, Sensors, Infrared detectors, Photoresist materials, Infrared radiation, Staring arrays, Microscopes
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