Dr. Yan-Ying He Profile

Dr. Yan-Ying He

at Taiwan Semiconductor Manufacturing Co Ltd

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Author

Publications (2)

Proceedings Article | 31 March 2014 Paper

Resist profile simulation with fast lithography model

Yan-Ying He, Chih-Shiang Chou, Yu-Po Tang, Wen-Chun Huang, Ru-Gun Liu, Tsai-Sheng Gau

Proceedings Volume 9052, 90520Y (2014) https://doi.org/10.1117/12.2045538

KEYWORDS: 3D modeling, Scanning electron microscopy, Diffusion, Data modeling, Lithography, Calibration, Semiconducting wafers, Visual process modeling, 3D image processing, Optical proximity correction

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Proceedings Article | 10 April 2013 Paper

Joint calibration of 3D resist image and CDSEM

C. S. Chou, Y. Y. He, Y. P. Tang, Y. T. Chang, W. C. Huang, R. G. Liu, T. S. Gau

Proceedings Volume 8681, 868113 (2013) https://doi.org/10.1117/12.2010846

KEYWORDS: 3D modeling, Scanning electron microscopy, Photoresist materials, Diffusion, Calibration, Critical dimension metrology, Performance modeling, 3D image processing, Optical proximity correction, Lithography

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