Dr. Yasuo Higashi Profile

Dr. Yasuo Higashi

at High Energy Accelerator Research Organization

SPIE Involvement:

Author

Publications (10)

Proceedings Article | 15 October 2013 Paper

Development of a high-speed nanoprofiler using normal vector tracing method for high-accuracy mirrors

Kohei Okuda, Takao Kitayama, Koji Usuki, Takuya Kojima, Kenya Okita, Junichi Uchikoshi, Yasuo Higashi, Katsuyoshi Endo

Proceedings Volume 8884, 888410 (2013) https://doi.org/10.1117/12.2029133

KEYWORDS: Mirrors, Photovoltaics, Spherical lenses, X-rays, Head, Optical components, Algorithm development, Synchrotron radiation, Extreme ultraviolet, Extreme ultraviolet lithography

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Proceedings Article | 18 December 2012 Paper

High-speed surface slope measuring profiler for aspheric shapes

Hiroki Matsumura, Koji Usuki, Takao Kitayama, Takuya Kojima, Junichi Uchikoshi, Yasuo Higashi, Tatsuya Kume, Kazuhiro Enami, Katsuyoshi Endo

Proceedings Volume 8550, 85501W (2012) https://doi.org/10.1117/12.981154

KEYWORDS: Aspheric lenses, Mirrors, Metrology, Lens design, Optical testing, Ray tracing, Spherical lenses, Optical alignment, Calibration, Sensors

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Proceedings Article | 18 December 2012 Paper

Development of a nanoprofiler using the follow-up normal vector to the surface for next-generation ultraprecise mirrors

Koji Usuki, Takao Kitayama, Hiroki Matsumura, Takuya Kojima, Junichi Uchikoshi, Yasuo Higashi, Katsuyoshi Endo

Proceedings Volume 8550, 85500P (2012) https://doi.org/10.1117/12.981162

KEYWORDS: Mirrors, Photovoltaics, Spherical lenses, Fizeau interferometers, Aspheric optics, Computer programming, Light sources, Synchrotron radiation, Extreme ultraviolet, Reconstruction algorithms

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Proceedings Article | 15 October 2012 Paper

Development of a high-speed nanoprofiler using normal vector tracing

T. Kitayama, H. Matsumura, K. Usuki, T. Kojima, J. Uchikoshi, Y. Higashi, K. Endo

Proceedings Volume 8501, 85010A (2012) https://doi.org/10.1117/12.929221

KEYWORDS: Mirrors, Photovoltaics, Interferometers, Spherical lenses, Fizeau interferometers, Spatial frequencies, Calibration, X-ray optics, EUV optics, Diodes

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Proceedings Article | 4 September 2009 Paper

High-precision profile measurement of a small radius lens by surface gradient integrated profiler

Y. Ueno, Y. Higashi, S. Tachibanada, J. Uchikoshi, T. Kume, K. Enami, H. Uchimura, K. Tanaka, K. Endo

Proceedings Volume 7448, 744804 (2009) https://doi.org/10.1117/12.826833

KEYWORDS: Mirrors, Calibration, Data analysis, 3D metrology, Aspheric lenses, Error analysis, Metrology, X-ray optics, Humidity, Spherical lenses

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Proceedings Article | 18 September 2008 Paper

Development of surface gradient integrated profiler: precise coordinate determination of normal vector measured points by self-calibration method and new data analysis from normal vector to surface profile

Y. Higashi, T. Ueno, K. Eno, J. Uchikoshi, T. Kume, K. Enami

Proceedings Volume 7077, 70770C (2008) https://doi.org/10.1117/12.796070

KEYWORDS: Mirrors, Calibration, Data analysis, Error analysis, Spherical lenses, Mirror pointing, Aspheric lenses, Sensors, Optical testing, Off axis mirrors

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Proceedings Article | 20 September 2007 Paper

Surface gradient integrated profiler for x-ray and EUV optics: self calibration method of measured position for an off-axis parabolic mirror (f=150mm) measurement

Y. Higashi, K. Endo, T. Kume, K. Enami, J. Uchikoshi, K. Ueno, Y. Mori

Proceedings Volume 6704, 67040D (2007) https://doi.org/10.1117/12.735973

KEYWORDS: Mirrors, Calibration, Off axis mirrors, X-ray sources, X-rays, Aspheric lenses, X-ray optics, EUV optics, Mirror pointing, Optical calibration

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Proceedings Article | 29 August 2006 Paper

Surface gradient integrated profiler for x-ray and EUV optics: 3D mapping of 1m-long flat mirror and off-axis parabolic mirror

Y. Higashi, Y. Takaie, K. Endo, T. Kume, K. Enami, K. Yamauchi, K. Yamamura, H. Sano, J. Uchikoshi, K. Ueno, Y. Mori

Proceedings Volume 6317, 63170B (2006) https://doi.org/10.1117/12.680245

KEYWORDS: Mirrors, Off axis mirrors, 3D metrology, Spherical lenses, Wavefronts, Photography, Phase shifts, X-ray optics, X-rays, Reflectivity

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Proceedings Article | 15 September 2005 Paper

A new designed ultra-high precision profiler

Y. Higashi, Y. Takaie, K. Endo, T. Kume, K. Enami, K. Yamauchi, K. Yamamura, H. Sano, K. Ueno, Y. Mori

Proceedings Volume 5921, 592107 (2005) https://doi.org/10.1117/12.617986

KEYWORDS: Mirrors, Sensors, X-rays, Interferometry, Aspheric lenses, Hard x-rays, Interferometers, Humidity, X-ray optics, EUV optics

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Proceedings Article | 20 October 1992 Paper

New machining method of a large-size asymmetric aspheric mirror

Yasuo Higashi, Sigeaki Koike, Toshikazu Takatomi, Shin Koizumi

Proceedings Volume 1720, (1992) https://doi.org/10.1117/12.132108

KEYWORDS: Mirrors, Aspheric optics, Motion measurement, Diamond machining, Servomechanisms, Light scattering, Capacitance, X-ray optics, Diamond, Synchrotron radiation

Showing 5 of 10 publications

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