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Yi-An Liou
at Powerchip Semiconductor Manufacturing Corp
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Publications (1)
Proceedings Article | 24 March 2009 Paper
Fast analysis and diagnostics for improving overlay control: moving beyond the black box approach
Yi-An Liu, Wei-Ming Wu, Hsiao-Chiang Lin, Jun-Cheng (Nelson) Lai, Chin-Chou (Kevin) Huang, Hsing-Chien (Robert) Wu, Healthy Huang, David Tien
Proceedings Volume 7272, 72722Z (2009) https://doi.org/10.1117/12.812478
KEYWORDS: Overlay metrology, Semiconducting wafers, Scanners, Error analysis, Reticles, Control systems, Diagnostics, Process control, Metrology, Process engineering
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