Dr. Yi-Chung Lo Profile

Dr. Yi-Chung Lo

at National Synchrotron Radiation Research Ctr

SPIE Involvement:

Author

Publications (6)

SPIE Journal Paper | 1 July 2005

Structure design of a 2-D high-aspect-ratio resonant microbeam accelerometer

Deng-Huei Hwang, Kan-Ping Chin, Yi-Chung Lo, Wensyang Hsu

JM3, Vol. 4, Issue 03, 033009, (July 2005) https://doi.org/10.1117/12.10.1117/1.2037070

KEYWORDS: Finite element methods, Structural design, Capacitors, Data modeling, Molecular bridges, Electrodes, Magnesium, Signal detection, Aluminum

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SPIE Journal Paper | 1 December 2004

New focusing mirror system for synchrotron radiation infrared beamlines

Shean-Jen Chen, Chien-Kuang Kuan, Shen-Yaw Perng, Duan-Jen Wang, H. Ho, T. Tseng, Yi-Chung Lo, Chien-Te Chen

OE, Vol. 43, Issue 12, (December 2004) https://doi.org/10.1117/12.10.1117/1.1813438

KEYWORDS: Mirrors, Infrared radiation, Synchrotron radiation, Metals, Infrared imaging, Polishing, Long wavelength infrared, Prisms, Mechanical engineering, Off axis mirrors

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Proceedings Article | 21 November 2001 Paper

Microfabrication of hemispherical polysilicon shells standing on hemispherical cavities

Cheng-Hsuan Lin, Yi-Chung Lo, Wensyang Hsu

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.449010

KEYWORDS: Wet etching, Silicon, Etching, Polysomnography, Ultrasonics, Photomasks, Coating, Microfabrication, Printing, Surface micromachining

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Proceedings Article | 21 November 2001 Paper

Development of a systematic recipe set for processing SU8-5 photoresist

Deng-Huei Hwang, Yi-Chung Lo, Kanping Chin

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448958

KEYWORDS: Photoresist developing, Photoresist materials, Semiconducting wafers, Polymers, Coating, Electroplating, Silicon, Microelectromechanical systems, Electrodes, Inspection

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