Yifeng Shao
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 4 October 2024 Presentation + Paper
Proceedings Volume 13115, 1311507 (2024) https://doi.org/10.1117/12.3028711
KEYWORDS: Extreme ultraviolet, Nanostructures, Reconstruction algorithms, Metrology, Phase retrieval

Proceedings Article | 4 October 2024 Presentation + Paper
Proceedings Volume 13115, 1311503 (2024) https://doi.org/10.1117/12.3027947
KEYWORDS: Diffraction, Extreme ultraviolet, Reflection, Interpolation, Mathematical optimization, Phase retrieval, Computational imaging, Lithographic metrology, Machine learning

Proceedings Article | 18 June 2024 Presentation
Jacob Seifert, Yifeng Shao, Rens van Dam, Dorian Bouchet, Tristan van Leeuwen, Allard Mosk
Proceedings Volume PC13023, PC130230H (2024) https://doi.org/10.1117/12.3029461
KEYWORDS: Signal to noise ratio, Statistical analysis, Image restoration, Computational imaging, Light sources and illumination, Image retrieval, Image quality, Diffraction, Statistical modeling, Reconstruction algorithms

SPIE Journal Paper | 12 June 2024 Open Access
AP, Vol. 6, Issue 03, 030502, (June 2024) https://doi.org/10.1117/12.10.1117/1.AP.6.3.030502
KEYWORDS: Lithography, Design, Patents, Optical storage, Physics, Tolerancing, Optical discs, Manufacturing, Laboratories, Photonics

SPIE Journal Paper | 28 January 2019 Open Access
Xingyuan Lu, Yifeng Shao, Chengliang Zhao, Sander Konijnenberg, Xinlei Zhu, Ying Tang, Yangjian Cai, H. Paul Urbach
AP, Vol. 1, Issue 01, 016005, (January 2019) https://doi.org/10.1117/12.10.1117/1.AP.1.1.016005
KEYWORDS: Correlation function, Spatial coherence, Global system for mobile communications, Fourier transforms, Coherence imaging, Diffraction, Sensors, Calibration, Imaging arrays, Far-field diffraction

Showing 5 of 8 publications
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