Mr. Yin-Kuang Yang Profile

Yin-Kuang Yang

at National Tsing Hua Univ

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Author

Publications (4)

Proceedings Article | 28 March 2017 Paper

Eliminate the vibration defect for laser interference lithography using an optical chopper system

Yin-Kuang Yang, Hsuan-Ying Mai, Te-Hsun Lin, Yu-Hua Dzeng, Chien-Chung Fu

Proceedings Volume 10147, 101471G (2017) https://doi.org/10.1117/12.2257865

KEYWORDS: Lithography, Optical lithography, Nanostructures, Optical choppers, Maskless lithography, Nanolithography, Vibration control, Electron beam lithography, Wavefronts, Scanning electron microscopy

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Proceedings Article | 28 March 2017 Paper

Improved multi-beam laser interference lithography system by vibration analysis model

Te Hsun Lin, Yin-Kuang Yang, Hsuan-Ying Mai, Chien-Chung Fu

Proceedings Volume 10145, 101452O (2017) https://doi.org/10.1117/12.2257111

KEYWORDS: Lithography, Optical lithography, Laser systems engineering, Vibrometry, Light sources, Laser development, Photoresist materials, Nanoimprint lithography, Semiconducting wafers, Sapphire

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Proceedings Article | 15 March 2016 Paper

Fabricate large area and defect free periodic structures with advance achromatic laser interference lithography

Yin-Kuang Yang, Yun-Wen Wang, Te-Hsun Lin, Chien-Chung Fu

Proceedings Volume 9780, 978017 (2016) https://doi.org/10.1117/12.2218871

KEYWORDS: Lithography, Optical lithography, Laser sources, Diffraction gratings, Mirrors, Diffraction, Wavefronts, Electron beam lithography

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Proceedings Article | 4 March 2016 Paper

Improve large area uniformity and production capacity of laser interference lithography with beam flattening device

Yin-Kuang Yang, Yu-Xiang Wu, Te-Hsun Lin, Chun-Wen Yu, Chien-Chung Fu

Proceedings Volume 9736, 97360Y (2016) https://doi.org/10.1117/12.2208645

KEYWORDS: Beam shaping, Lithography, Optical lithography, Maskless lithography, Thin films, Transmittance, Reflectivity, Reflection, Nanolithography, Nanostructures

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