Ms. Yoko Miyazaki Profile

Yoko Miyazaki

Senior Manager at Tokyo Seimitsu Co Ltd

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Publications (3)

Proceedings Article | 24 March 2006 Paper

Verification of the system of defect inspection on patterned wafers using sub-200nm wavelength light

Tetsuo Takahashi, Yoko Miyazaki, Toshihiko Tanaka, Tsuneo Terasawa, Naoya Takeuchi

Proceedings Volume 6152, 615226 (2006) https://doi.org/10.1117/12.654730

KEYWORDS: Deep ultraviolet, Semiconducting wafers, Ultraviolet radiation, Reflectivity, Inspection, Wafer-level optics, Defect inspection, Imaging systems, Defect detection, Image analysis

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Proceedings Article | 7 July 1997 Paper

Characterization of real particle size for the process particle monitor using laser surface scanners

Yoko Miyazaki, Toshiaki Mugibayashi, Masahiko Ikeno

Proceedings Volume 3050, (1997) https://doi.org/10.1117/12.275922

KEYWORDS: Particles, Semiconducting wafers, Laser scanners, 3D scanning, Calibration, Scanning electron microscopy, Latex, Beam controllers, Polarization, Laser applications

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Proceedings Article | 1 June 1992 Paper

Surface defect inspection system with an optical spatial frequency filter for semiconductor patterned wafers

Yoko Miyazaki, Hitoshi Tanaka, Nobuyuki Kosaka, Toshimasa Tomoda

Proceedings Volume 1673, (1992) https://doi.org/10.1117/12.59810

KEYWORDS: Image filtering, Semiconducting wafers, Optical filters, Inspection, Spatial filters, Imaging systems, Spatial frequencies, Signal to noise ratio, Defect inspection, Laser irradiation

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