Dr. Yoon-Jong Song Profile

Dr. Yoon-Jong Song

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

On-cell thickness monitoring of chalcogenide alloy layer using spectral interferometry, Raman spectroscopy, and hybrid machine learning

Hyunwoo Ryoo, Seul Ji Song, Min Ji Jeon, Juhyun Moon, JiHye Lee, ByungHyun Hwang, Jeongho Ahn, Yoon-jong Song, Hidong Kwak, Lior Neeman, Noga Meir, Jaehong Jang, Ik Hwan Kim, Hyunkyu Kim

Proceedings Volume 12955, 129550G (2024) https://doi.org/10.1117/12.3012496

KEYWORDS: Raman spectroscopy, Transmission electron microscopy, Interferometry, Semiconducting wafers, Signal intensity, Machine learning, Film thickness, Diffractive optical elements, Chalcogenides, Calibration

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Proceedings Article | 27 April 2023 Presentation + Paper

A novel method for improving yield prediction by matching layout pattern and defect inspection

Min-Chul Han, Chang-Hun Ko, Cheol-Hwan Kim, Masayuki Terai, Hye-Sun Kim, Oh-Hun Kwon, Ji-Hyun Cheon, Jin-Woo Choi, Jung-Hoon Park, Kyu-Sul Park, Jae-Ho Pak, Do-Youn Park, Seung-Ryeol Oh, Min-Su Kim, Hyun-Woo Ryoo, Myung-Chul Shin, Bo-Tak Lim, Il-Mok Park, Hyuck-Joon Kwon, Yoon-Jong Song, Jung-Yun Choi, Gwan-Hyeob Koh, Hyung-Jong Ko, Yu-Gyun Shin

Proceedings Volume 12496, 124961N (2023) https://doi.org/10.1117/12.2656206

KEYWORDS: Semiconducting wafers, Defect inspection, Inspection, Yield improvement, Failure analysis, Electrical breakdown, Semiconductors, Manufacturing, Logic, Image classification

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