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Yun-Ting Yu
at National Tsing Hua Univ
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Publications (1)
Proceedings Article | 26 June 2017 Paper
Surface profile measurement by using the integrated Linnik WLSI and confocal microscope system
Wei-Chung Wang, Ming-Hsing Shen, Chi-Hung Hwang, Yun-Ting Yu, Tzu-Fong Wang
Proceedings Volume 10329, 103291A (2017) https://doi.org/10.1117/12.2270195
KEYWORDS: 3D metrology, Confocal microscopy, 3D image enhancement, Microscopes, Optical scanning systems, Semiconductors, Signal analyzers, 3D image processing, Titanium, Surface roughness, Image filtering, Curium, Interferometers, Surface plasmons
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