We have developed an X-ray zoom condenser optical system using deformable mirrors that can adjust the beam size by deformation of their shape. The shapes of deformable mirrors are changed by a combination of mechanical and piezoelectric bending. Large deformations up to third order polynomials are achieved by mechanical bending. More precise shapes are achieved by piezoelectric bimorph mirror. However, because both ends of the mirror are mechanically clamped, capability of deformation by piezoelectric bending is lower than that of free-standing piezoelectric bimorph mirrors. So, we propose a bending method that tunes the mechanical bending conditions to intentionally leave the optimized shape error to be easily compensated by the piezoelectric bending process.
Various types of X-ray focusing optical systems are used at X-ray synchrotron radiation and free-electron laser facilities. However, these are designed for specific purposes and fixed optical parameters such as the numerical aperture (NA). Their lack of adaptability limits their application targets. In this research, we developed an X-ray adaptive focusing optical system which can control the beam size without moving the position of focus. The optical system consists of two deformable mirrors in one dimension. To vary the focused beam size, the NA is controlled by deforming the shape of the mirrors from concave to convex. The results will be presented along with the aberration properties estimated by ray trace and wave optical methods.
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