Ms. Yuko Iwabuchi Profile

Yuko Iwabuchi

at Hitachi High-Tech Corp

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Publications (3)

Proceedings Article | 27 April 2023 Presentation + Paper

Laser-assisted SEM for high-spatial resolution material metrology and inspection

Yasuhiro Shirasaki, Minami Shoji, Yohei Nakamura, Shota Mitsugi, Heita Kimizuka, Satoshi Takada, Yuko Iwabuchi, Natsuki Tsuno

Proceedings Volume 12496, 124961T (2023) https://doi.org/10.1117/12.2658184

KEYWORDS: Scanning electron microscopy, Laser irradiation, Electron beams, Materials properties, Semiconductors, Metrology, Inspection

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Proceedings Article | 27 April 2023 Poster + Paper

Laser assisted SEM for visualizing electrical property using voltage contrast dynamics

Minami Shoji, Yohei Nakamura, Yasuhiro Shirasaki, Shota Mitsugi, Heita Kimizuka, Satoshi Takada, Yuko Iwabuchi, Natsuki Tsuno

Proceedings Volume 12496, 1249630 (2023) https://doi.org/10.1117/12.2658182

KEYWORDS: Scanning electron microscopy, Resistance, Laser irradiation, Electrical properties, Modulation, Manufacturing, Inspection, Metals, Laser development, Electron beams

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Proceedings Article | 26 May 2022 Poster + Paper

Fast generation of SEM images including charging effect by neural network

H. Du, T. Yokosuka, Y. Iwabuchi, M. Suzuki, Y. Aoki

Proceedings Volume 12053, 120531Y (2022) https://doi.org/10.1117/12.2613955

KEYWORDS: Scanning electron microscopy, Neural networks, Monte Carlo methods, Sensors, Evolutionary algorithms, Computer simulations, Image processing, Algorithm development, Visibility, Convolutional neural networks

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