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Yusuke Satoh
at Tohoku Instutute of Technology
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Publications (1)
Proceedings Article | 23 January 2006 Paper
5~10 GHz surface acoustic wave resonators and low-loss wide band filters using submicron fabrication technology
K. Yamanouchi, Y. Satoh, H. Isono, D. Kawasaki
Proceedings Volume 6109, 61090P (2006) https://doi.org/10.1117/12.645639
KEYWORDS: Resonators, Silica, Thin films, Signal attenuation, Electrodes, Acoustics, Transducers, Wave propagation, Nanotechnology, Lithography
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