The aspherical mirror surface quality testing by using compensation null lens in interferometer is described in this paper. For 310mm, f/0.5 hyperboloid mirror microcrystalline components, based on the theory of aberration compensation, a kind of null lens system which is composed of three pieces of spherical lens is developed. A certain amount of spherical aberration is introduced to the null lens for compensating the deviation of aspheric surface in a normal direction. The design result shows that the primary aberration and the senior aberration are balanced well, the MTF is closed to the diffraction limit and the residual wave aberration (RMS) is less than 0.004λ (λ=0.6328μm). Every indicators of the system meets the requirements of high precision detection of null lens system design. In this paper, the errors caused by the manufacturing, testing and assembling of the null lens system are analyzed. Those errors can be divided into the symmetric error and the asymmetric error. Using the correction method, the influence of the asymmetric error is minimized which seemed bigger than the asymmetric one. Finally, analysis results show that the total residual wave aberration of the system is less than 0.0072λ, which satisfies the requirement of aspheric testing. This null lens system has been applied to aspheric processing.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.