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Zhigang Zhao
at Shenzhen Univ
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Publications (1)
Proceedings Article | 4 January 2008 Paper
Fabrication of wall array by electrochemical etching of n-type silicon
Zhigang Zhao, Caili Bai, Jinchuan Guo, Hanben Niu
Proceedings Volume 6836, 68360W (2008) https://doi.org/10.1117/12.755878
KEYWORDS: Etching, Silicon, Photomicroscopy, Electrochemical etching, Semiconducting wafers, Scanning electron microscopy, Aluminum, Lamps, High aspect ratio silicon micromachining, Halogens
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