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Dr. Zhilong Rao
at Coherent Corp
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Author
Publications (4)
Proceedings Article | 18 March 2009 Paper
Interference assisted lithography for patterning of 1D gridded design
Proceedings Volume 7271, 72712U (2009) https://doi.org/10.1117/12.812033
KEYWORDS: Lithography, Diffusion, Photomasks, Critical dimension metrology, Optical lithography, 193nm lithography, Double patterning technology, Logic, Metals, Electron beam lithography
Proceedings Article | 18 July 2007 Paper
A high-intensity bowtie nano-aperture vertical-cavity surface-emitting laser for ultrahigh-density near-field optical data storage
Proceedings Volume 6620, 66201V (2007) https://doi.org/10.1117/12.738952
KEYWORDS: Vertical cavity surface emitting lasers, Near field, Polarization, Optical storage, Metals, Gold, Coating, Polarization control, Gallium, Near field optics
Proceedings Article | 10 February 2006 Paper
A C-shaped nanoaperture vertical-cavity surface-emitting laser for high-density near-field optical data storage
Proceedings Volume 6132, 61320J (2006) https://doi.org/10.1117/12.645083
KEYWORDS: Vertical cavity surface emitting lasers, Polarization, Near field, Optical storage, Near field optics, Polarization control, Gold, Metals, Aluminum, Finite-difference time-domain method
Proceedings Article | 7 April 2005 Paper
Thick lattice-matched GaInNAs films in photodetector applications
Proceedings Volume 5726, (2005) https://doi.org/10.1117/12.591315
KEYWORDS: Indium gallium arsenide, Gallium arsenide, Photodetectors, Signal to noise ratio, Absorption, LIGO, Annealing, Luminescence, Quantum efficiency, Internal quantum efficiency
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