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Kishore Uppireddi
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Publications (1)
Proceedings Article | 19 September 2007 Paper
Characterization of radio-frequency sputtered AlN films by spectroscopic ellipsometry
D. Huang, K. Uppireddi, V. Pantojas, W. Otaño-Rivera, B. Weiner, G. Morell
Proceedings Volume 6647, 66470M (2007) https://doi.org/10.1117/12.734985
KEYWORDS: Aluminum nitride, Molybdenum, Aluminum, Silicon, Sputter deposition, Thin films, Spectroscopic ellipsometry, Crystals, Refractive index, Atomic force microscopy
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