A non-matching algorithm displacement measurement based on gray scale is proposed in this paper in order to realize the measurement of displacement of MEMS micro structures with high precision. In this method, Against the clear sequences of moving image are obtained by imaging technology of strobe lighting. First, the region of interest(ROI) are selected from still images and stroboscopic images and use bilinear interpolation in the two regions. Moreover, characteristic curve of gray value are generated along a single direction after interpolated. Finally, the difference between the two characteristic curves of gray value in ROI are calculated. At the same time, the error caused by image contrast and brightness is compensated and optimized the detection results. The experimental results indicate that with this method, the precision of the measurement of MEMS micro structures in-plane displacement can reach sub-pixel level, which can obtain the displacement of MEMS in real time with high precision.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.