Mr. Riaz R. Haque Profile

Riaz R. Haque

Product Evaluation Engineer

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Publications (2)

Proceedings Article | 18 March 2016 Paper

3D mask effects of absorber geometry in EUV lithography systems

Riaz Haque, Zac Levinson, Bruce Smith

Proceedings Volume 9776, 97760F (2016) https://doi.org/10.1117/12.2219708

KEYWORDS: Photomasks, Extreme ultraviolet lithography, Extreme ultraviolet, 3D modeling, Phase shifts, Systems modeling, Deep ultraviolet, Monochromatic aberrations, Diffraction, Lithography, 3D image processing, Point spread functions

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Proceedings Article | 7 March 2014 Paper

Tunable plasmonic metamaterial based on transparent conducting oxide

Kaifeng Shi, Riaz Haque, Wangshi Zhao, Runchen Zhao, Zhaolin Lu

Proceedings Volume 8980, 898012 (2014) https://doi.org/10.1117/12.2037921

KEYWORDS: Modulators, Reflectivity, Modulation, Dielectrics, Interfaces, Plasmonics, Metamaterials, Oxides, Multilayers, Electrooptic modulators

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