Ms. Qi Yan Profile

Qi Yan

at Institute of Microelectronics of the CAS

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Publications (2)

Proceedings Article | 1 May 2023 Poster + Paper

Study of selective isotropic etching effects of Si1-xGex in gate-all-around nanosheet transistor process

Qi Yan, Hua Shao, Junjie Li, Zhenzhen Kong, Xiaobin He, Junfeng Li, Tao Yang, Rui Chen, Yayi Wei

Proceedings Volume 12499, 124990K (2023) https://doi.org/10.1117/12.2658312

KEYWORDS: Etching, Silicon, Monte Carlo methods, Germanium, Isotropic etching, Nanosheets, Transistors, Gallium arsenide, Anisotropic etching, Particles

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Proceedings Article | 25 May 2022 Presentation + Paper

Modeling of SiN inner spacer deposition in gate-all-around nanosheet FET process

Hua Shao, Rui Chen, Junjie Li, Guobin Bai, Chen Li, Qi Yan, Yayi Wei

Proceedings Volume 12055, 1205502 (2022) https://doi.org/10.1117/12.2612445

KEYWORDS: Low pressure chemical vapor deposition, Plasma enhanced chemical vapor deposition, Scanning electron microscopy, Silicon, Ions, Field effect transistors, Transmission electron microscopy, Process modeling, Deposition processes, Computer simulations

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