Environmental friendly Te-free phase change material of TixSb2.19Se was investigated for PCM application. As the important thermal properties, the crystallization temperature (Tc) and data retention for ten years for the best selected composition Ti0.34Sb2.19Se (TSS) are 234°C and 160‡C, respectively. Detection of the crystal structure of TSS by means of XRD, TEM and XPS reveals that the grains are more uniform compared with Ge2Sb2Te5 (GST). The Set and Reset operation voltages for TSS-based phase change memory devices are much lower than those of conventional GST-based ones. Remarkably, the TSS device exhibits an extremely high phase change speed of 10 ns.
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