A path planning method for real time correction of image distortion in atomic force microscope

Lian-Sheng Zhang; Jun-Jie Yan; Ying-Jun Lei; Rui-Jun Li; Qiang-Xian Huang

doi:10.1117/12.2617305

19 November 2021 A path planning method for real time correction of image distortion in atomic force microscope

Lian-Sheng Zhang, Jun-Jie Yan, Ying-Jun Lei, Rui-Jun Li, Qiang-Xian Huang

Proceedings Volume 12059, Tenth International Symposium on Precision Mechanical Measurements; 1205921 (2021) https://doi.org/10.1117/12.2617305
Event: Tenth International Symposium on Precision Mechanical Measurements, 2021, Qingdao, China

Abstract

The image quality and accuracy of the atomic force microscope are seriously affected due to drift and hysteresis of Piezoelectric positioning platform. Currently, the distortion correction methods had been confined in tracking a certain area or image correction after images are acquired, which makes it difficult for the atomic force microscope (AFM) to obtain low distortion images. In this study, the scanning path of the AFM is redesigned. The scanning route is spiral in a whole with many blocks which are scanned once at a time, and the drift of blocks is corrected in real-time during the scanning process. This method is suitable for real-time correction of drift during long-time scanning, compared with the traditional scanning method.

Citation Download Citation

Lian-Sheng Zhang, Jun-Jie Yan, Ying-Jun Lei, Rui-Jun Li, and Qiang-Xian Huang "A path planning method for real time correction of image distortion in atomic force microscope", Proc. SPIE 12059, Tenth International Symposium on Precision Mechanical Measurements, 1205921 (19 November 2021); https://doi.org/10.1117/12.2617305

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