Author Affiliations +
Il Hwan Kim,1 Cheolgyu Hyun,1 Sangho Jo,1 Muyoung Lee,1 Ikjun Jang,1 Jongsu Kim,1 Jinhong Park,1 Yigwon Kim,1 Chang Min Park,1 Kevin Houchens,2 Jenny Perry,2 Nahum Bomshtein,2 Liad Anokov,2 Noam Oved,2 Uri Smolyan,2 Michael Shifrin,2 Tal Itzkovich,2 Jeong Ho Yeo,3 You Jin Kim,3 Baek Jun Kim3
1Samsung Electronics Co., Ltd. (Korea, Republic of)
2Applied Materials Israel, Ltd. (Israel)
3Applied Materials Korea, Ltd. (Korea, Republic of)