Model-based OPC for first-generation 193-nm lithography

Kevin D. Lucas; James C. Word; Geert Vandenberghe; Staf Verhaegen; Rik M. Jonckheere

doi:10.1117/12.435670

14 September 2001 Model-based OPC for first-generation 193-nm lithography

Kevin D. Lucas, James C. Word, Geert Vandenberghe, Staf Verhaegen, Rik M. Jonckheere

Proceedings Volume 4346, Optical Microlithography XIV; (2001) https://doi.org/10.1117/12.435670
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

The first 193 nm lithography processes using model-based OPC will soon be in production for 0.13 micrometer technology semiconductor manufacturing. However, the relative immaturity of 193 nm resist, etch and reticle processes places considerable strain upon the OPC software to compensate increased non-linearity, proximity bias, corner rounding and line-end pullback. We have evaluated three leading model-based OPC software packages with 193 nm lithography on random logic poly gate designs for the 0.13 micrometer generation. Our analysis has been performed for three different OPC reticle write processes, two leading 193 nm resists and multiple illumination conditions. The results indicate that the maturity of the model-OPC software tools for 193 nm lithography is generally good, although specific improvements are recommended.

Citation Download Citation

Kevin D. Lucas, James C. Word, Geert Vandenberghe, Staf Verhaegen, and Rik M. Jonckheere "Model-based OPC for first-generation 193-nm lithography", Proc. SPIE 4346, Optical Microlithography XIV, (14 September 2001); https://doi.org/10.1117/12.435670

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available