Dr. Hiroki Morita Profile

Dr. Hiroki Morita

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Publications (3)

Proceedings Article | 26 August 2024 Paper

A short wavelength light source for lithography using a regenerative liquid metal bismuth target

Tatsuya Soramoto, Ayaka Ogiwara, Tsukasa Sugiura, Hiroki Morita, Takeshi Higashiguchi

Proceedings Volume 13177, 1317714 (2024) https://doi.org/10.1117/12.3032351

KEYWORDS: Bismuth, Liquids, Lithography, Photons, Ions, Light sources, Plasma, Solids, Pulsed laser operation, Beam diameter

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Proceedings Article | 26 August 2024 Paper

Spatial separation of EUV emission and energetic ions by use of double-laser-pulse irradiation

Tsukasa Sugiura, Hayato Yazawa, Takeru Niinuma, Masaki Kume, Hiroki Morita, Takeshi Higashiguchi

Proceedings Volume 13177, 1317715 (2024) https://doi.org/10.1117/12.3032289

KEYWORDS: Ions, Extreme ultraviolet, Ion irradiation, Tin, Laser irradiation, Plasma, Mirrors, Pulsed laser operation, Solids, X-rays

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Proceedings Article | 29 September 2023 Paper

Evaluation of suprathermal ions in a laser-produced plasma beyond-EUV source

Takeru Niinuma, Tsukasa Sugiura, Masaki Kume, Yuto Nakayama, Hiroki Morita, Atsushi Sunahara, Shinichi Namba, Takeshi Higashiguchi

Proceedings Volume 12915, 129150L (2023) https://doi.org/10.1117/12.2687366

KEYWORDS: Ions, Pulsed laser operation, Gadolinium, Plasma, Picosecond phenomena, Extreme ultraviolet, Light sources, Mirrors, Laser irradiation, Microchannel plates

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