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Dr. Irwan Setija
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 13 May 2013 Paper
Alternative discretization in the aperiodic Fourier modal method leading to reduction in computational costs
Proceedings Volume 8789, 87890K (2013) https://doi.org/10.1117/12.2020851
KEYWORDS: Electroluminescent displays, Maxwell's equations, Mathematical modeling, Stars, Numerical analysis, Process modeling, Scattering, Glasses, Analytical research, Inspection
Proceedings Article | 14 May 2010 Paper
An extended Fourier modal method for plane-wave scattering from finite structures
Maxim Pisarenco, Joseph Maubach, Irwan Setija, Robert Mattheij
Proceedings Volume 7717, 77171H (2010) https://doi.org/10.1117/12.854420
KEYWORDS: Scattering, Diffraction gratings, Waveguides, Ordinary differential equations, Diffraction, Binary data, Refractive index, Superposition, Finite-difference time-domain method, Transmittance
Proceedings Article | 10 May 2005 Paper
Advances in phase-grating-based wafer alignment systems
Stefan Keij, Irwan Setija, Gerbrand van der Zouw, Earl Ebert
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599090
KEYWORDS: Semiconducting wafers, Optical alignment, Overlay metrology, Sensors, Signal to noise ratio, Interferometers, Metrology, Inspection, Process control, Optical lithography
Conference Committee Involvement (5)
Modeling Aspects in Optical Metrology
26 June 2017 | Munich, Germany
Modeling Aspects in Optical Metrology V
23 June 2015 | Munich, Germany
Modeling Aspects in Optical Metrology IV
13 May 2013 | Munich, Germany
Modeling Aspects in Optical Metrology
23 May 2011 | Munich, Germany
Modeling Aspects in Optical Metrology
15 June 2009 | Munich, Germany
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