Dr. Jun Sakuma Profile

Dr. Jun Sakuma

Senior Fellow at Lasertec Corp

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Author

Publications (8)

Proceedings Article | 9 November 2005 Paper

CW DUV light sources for inspection tools

Jun Sakuma, Yasuyuki Okada, Tetsumi Sumiyoshi, Hitoshi Sekita, Minoru Obara

Proceedings Volume 5992, 599243 (2005) https://doi.org/10.1117/12.632101

KEYWORDS: Deep ultraviolet, Atomic force microscopy, Crystals, Continuous wave operation, Light sources, Nonlinear crystals, Second-harmonic generation, Inspection, Fiber lasers

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Proceedings Article | 1 June 2004 Paper

Stable long-life 1-W femtosecond laser for industrial and biomedical applications

Yusuke Tamaki, Hitoshi Sekita, Kazuya Takasago, Tetsumi Sumiyoshi, Jun Sakuma

Proceedings Volume 5340, (2004) https://doi.org/10.1117/12.522289

KEYWORDS: Biomedical optics, Femtosecond phenomena, Ultrafast lasers, Laser development, Pulsed laser operation, Biological research

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Proceedings Article | 19 June 2003 Paper

Ablation processing of biomedical materials by ultrashort laser pulse ranging from 50 fs through 2 ps

Kazue Ozono, Minoru Obara, Jun Sakuma

Proceedings Volume 4978, (2003) https://doi.org/10.1117/12.478589

KEYWORDS: Laser ablation, Picosecond phenomena, Calcium, Teeth, Femtosecond phenomena, Bone, Phosphorus, Ultrafast phenomena, Sapphire lasers, Laser processing

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Proceedings Article | 14 September 2001 Paper

Spectral measurement of ultra line-narrowed F2 laser

Osamu Wakabayashi, Jun Sakuma, Toru Suzuki, Hirokazu Kubo, Naoki Kitatochi, Takashi Suganuma, Takanori Nakaike, Takahito Kumazaki, Kazuaki Hotta, Hakaru Mizoguchi, Kiyoharu Nakao, Tadashi Togashi, Yasuo Nabekawa, Shuntaro Watanabe

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435638

KEYWORDS: Spectroscopy, Vacuum ultraviolet, Light sources, Laser development, Michelson interferometers, Calibration, Xenon, Spectral calibration, Excimer lasers, Sapphire lasers

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Proceedings Article | 14 September 2001 Paper

Long pulse duration of F2 laser for 157-nm lithography

Hidenori Watanabe, Naoki Kitatochi, Kouji Kakizaki, Akifumi Tada, Jun Sakuma, Tatsuya Ariga, Kazuaki Hotta

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435639

KEYWORDS: Pulsed laser operation, Oscillators, Laser development, Lithography, Laser systems engineering, Electronics, Optical amplifiers, Laser applications, Reflectivity, Laser resonators

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Proceedings Article | 3 April 2000 Paper

High-power narrowband DUV laser source by frequency mixing in CLBO

Jun Sakuma, Andrew Finch, Yasu Ohsako, Kyoichi Deki, Masahiro Horiguchi, Toshio Yokota, Yusuke Mori, Takatomo Sasaki

Proceedings Volume 3889, (2000) https://doi.org/10.1117/12.380924

KEYWORDS: Deep ultraviolet, Crystals, Atomic force microscopy, Ultraviolet radiation, Sapphire lasers, Solid state lasers, Neodymium lasers, Laser crystals, Nonlinear crystals, High power lasers

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Proceedings Article | 26 July 1999 Paper

Watt-level DUV generation by solid state laser for lithography

Yasu Ohsako, Jun Sakuma, Andrew Finch, Kyoichi Deki, Masahiro Horiguchi, Toshio Yokota

Proceedings Volume 3679, (1999) https://doi.org/10.1117/12.354361

KEYWORDS: Deep ultraviolet, Solid state lasers, Laser systems engineering, Neodymium lasers, Nonlinear crystals, Complex systems, Crystals, Lithography, Laser development, Lithium

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Proceedings Article | 23 September 1997 Paper

Midinfrared atmospheric transmittance measurements by using the second and third harmonics of tunable TEA-CO2 lasers

Akiko Harasaki, Jun Sakuma, Toshie Itoh, Takao Chonan, Yoshiyuki Fukuyama, Ryuichi Horie, Masakatsu Sugii

Proceedings Volume 3125, (1997) https://doi.org/10.1117/12.279031

KEYWORDS: Transmittance, Humidity, Crystals, Atmospheric optics, Nonlinear crystals, Carbon dioxide lasers, Molecules, Tunable lasers, Absorption, Laser crystals

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Showing 5 of 8 publications

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