Dr. Klaus Freischlad Profile

Dr. Klaus Freischlad

Managing Director Optics at InterOptics LLC

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Author

Publications (22)

Proceedings Article | 30 November 2023 Presentation + Paper

Measurement of radius of curvature with a low-coherence flatness interferometer

Klaus Freischlad

Proceedings Volume 12778, 127780N (2023) https://doi.org/10.1117/12.2690824

KEYWORDS: Partial coherence, Temporal coherence, Spatial coherence, Interferometers, Spherical lenses, Optical surfaces, Calibration, Wavefronts, Measurement uncertainty, Reflection, Optical spheres, Fizeau interferometers, Interferograms

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Proceedings Article | 28 October 2021 Presentation + Paper

Measurement of transmitted wavefront error and homogeneity with a low-coherence interferometer

Klaus Freischlad

Proceedings Volume 11889, 118890B (2021) https://doi.org/10.1117/12.2602814

KEYWORDS: Refractive index, Interferometers, Wavefronts, Mirrors, Light emitting diodes, Interferometry, Temporal coherence, Spatial coherence

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Proceedings Article | 15 November 2019 Presentation + Paper

Advantages of a low coherence interferometer for optical testing

Chris Koliopoulos, Klaus Freischlad

Proceedings Volume 11175, 1117516 (2019) https://doi.org/10.1117/12.2536685

KEYWORDS: Interferometers, Coherence (optics), Surface finishing, Optical testing, Optical components, Polishing, Glasses, Wavefronts, Spatial resolution, LED lighting

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Proceedings Article | 21 June 2019 Presentation + Paper

Topography measurement of glass disk substrates with sub-nanometer resolution

Klaus Freischlad, Chris Koliopoulos

Proceedings Volume 11056, 110560A (2019) https://doi.org/10.1117/12.2526215

KEYWORDS: Interferometers, Calibration, Light emitting diodes, Spatial coherence, Linear filtering, Interferometry, Temporal coherence, Optical metrology

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Proceedings Article | 13 September 2012 Paper

Sub-angstrom surface metrology with a virtual reference interferometer

Klaus Freischlad

Proceedings Volume 8493, 84930B (2012) https://doi.org/10.1117/12.928975

KEYWORDS: Interferometers, Beam splitters, Calibration, Linear filtering, Cameras, Spatial frequencies, Interferometry, Mirrors, Data acquisition, Metrology

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Proceedings Article | 13 September 2012 Paper

A next-generation optical surface form inspection instrument for high-volume production applications

Richard Bills, Klaus Freischlad

Proceedings Volume 8494, 84940H (2012) https://doi.org/10.1117/12.928888

KEYWORDS: Inspection, Optical inspection, Surface finishing, Interferometers, Visualization, Lenses, Polishing, Metrology, Monochromatic aberrations, Optical spheres

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Proceedings Article | 21 November 2007 Paper

High accuracy measurements of objects with multiple reflective surfaces with wavelength shifting interferometry

Shouhong Tang, Richard Bills, Klaus Freischlad

Proceedings Volume 6723, 67230F (2007) https://doi.org/10.1117/12.782882

KEYWORDS: Interferometers, Glasses, Extreme ultraviolet lithography, Phase shifts, Reflectivity, Fizeau interferometers, Photomasks, Surface finishing, Phase shifting, Light sources

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Proceedings Article | 14 September 2007 Paper

Weighted least-square approach for simultaneous measurement of multiple reflective surfaces

Shouhong Tang, Richard Bills, Klaus Freischlad

Proceedings Volume 6671, 66710T (2007) https://doi.org/10.1117/12.735151

KEYWORDS: Phase shifts, Reflectivity, Fizeau interferometers, Surface finishing, Interferometers, Phase shifting, Tunable lasers, Reflection, Light sources, Refractive index

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Proceedings Article | 10 September 2007 Paper

High resolution interferometric metrology for patterned wafers

Shouhong Tang, Klaus Freischlad, Petrie Yam

Proceedings Volume 6672, 667208 (2007) https://doi.org/10.1117/12.735121

KEYWORDS: Semiconducting wafers, Interferometry, Reflection, Metrology, Interferometers, Phase shifts, Reflectivity, Chemical mechanical planarization, Scanning probe microscopy, Wavefronts

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Proceedings Article | 10 September 2007 Paper

Interferometry for wafer dimensional metrology

Klaus Freischlad, Shouhong Tang, Jim Grenfell

Proceedings Volume 6672, 667202 (2007) https://doi.org/10.1117/12.732546

KEYWORDS: Semiconducting wafers, Interferometry, Interferometers, Photovoltaics, Dimensional metrology, Metrology, Wafer-level optics, Beam splitters, Cameras, Chemical mechanical planarization

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Proceedings Article | 30 May 2003 Paper

Interference microscope for sub-Angstrom surface roughness measurements

Christopher Saxer, Klaus Freischlad

Proceedings Volume 5144, (2003) https://doi.org/10.1117/12.500925

KEYWORDS: Microscopes, Phase shifts, Objectives, Surface roughness, Head, Spherical lenses, Spatial frequencies, Phase measurement, Optical filters, Aspheric lenses

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Proceedings Article | 20 June 2002 Paper

Interferometer for testing in vibration environments

Klaus Freischlad, Ron Eng, James Hadaway

Proceedings Volume 4777, (2002) https://doi.org/10.1117/12.472245

KEYWORDS: Interferometers, Mirrors, Optical testing, Cameras, Interferometry, Phase shifts, Data acquisition, Cryogenics, Wavefronts, Phase shifting

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Proceedings Article | 29 September 1998 Paper

Fourier analysis of phase-shifting algorithms

Klaus Freischlad

Proceedings Volume 3407, (1998) https://doi.org/10.1117/12.323373

KEYWORDS: Signal detection, Electronic filtering, Optical filters, Phase shift keying, Modulation, Phase shifts, Linear filtering, Photovoltaics, Algorithm development, Detection and tracking algorithms

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Proceedings Article | 17 September 1997 Paper

Interferometer for optical waviness and figure testing

Klaus Freischlad

Proceedings Volume 3098, (1997) https://doi.org/10.1117/12.281208

KEYWORDS: Modulation transfer functions, Interferometers, Spatial frequencies, Point spread functions, Optical testing, Spatial resolution, Speckle, Imaging systems, Phase shifts, Signal to noise ratio

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Proceedings Article | 4 November 1996 Paper

Large flat panel profiler

Klaus Freischlad

Proceedings Volume 2862, (1996) https://doi.org/10.1117/12.256200

KEYWORDS: Interferometers, Cameras, Glasses, Spatial coherence, Spatial frequencies, Reticles, Flat panel displays, Optical testing, Distortion, Photovoltaics

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Proceedings Article | 17 July 1996 Paper

Infrared interferometer for optical testing

Klaus Freischlad, Jasmin Cote

Proceedings Volume 2860, (1996) https://doi.org/10.1117/12.276308

KEYWORDS: Interferometers, Optical testing, Beam expanders, Calibration, Cameras, Phase shifts, Data acquisition, Infrared radiation, Beam splitters, Mirrors

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Proceedings Article | 26 May 1995 Paper

Dual-wavelength interferometer for testing projection lenses

Klaus Freischlad, Chunsheng Huang

Proceedings Volume 2440, (1995) https://doi.org/10.1117/12.209301

KEYWORDS: Interferometers, Wavefronts, Lenses, Optical spheres, Calibration, Mirrors, Beam expanders, Data acquisition, Reticles, Cameras

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Proceedings Article | 5 February 1993 Paper

Wavefront integration from difference data

Klaus Freischlad

Proceedings Volume 1755, (1993) https://doi.org/10.1117/12.140771

KEYWORDS: Wavefronts, Reconstruction algorithms, Fourier transforms, Data integration, Wave propagation, Interferometry, Optical testing, Shearing interferometers, Wavefront reconstruction, Ronchi rulings

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Proceedings Article | 5 February 1993 Paper

Speckle reduction by virtual spatial coherence

Klaus Freischlad, Michael Kuechel

Proceedings Volume 1755, (1993) https://doi.org/10.1117/12.140784

KEYWORDS: Wavefronts, Speckle, Cameras, Interferometers, Spatial coherence, Light sources, Interferometry, Speckle pattern, Spatial resolution, Light scattering

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Proceedings Article | 1 January 1991 Paper

Software concept for the new Zeiss interferometer

Bernd Doerband, Wolfgang Wiedmann, Ulrich Wegmann, C. Kuebler, Klaus Freischlad

Proceedings Volume 1332, (1991) https://doi.org/10.1117/12.51117

KEYWORDS: Wavefronts, Interferometers, Calibration, Image processing, Optical testing, Optical inspection, Video, Visualization, Control systems, Data acquisition

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Proceedings Article | 1 January 1991 Paper

Real-time wavefront measurement with lambda/10 fringe spacing for the optical shop

Klaus Freischlad, Michael Kuechel, Karl-Heinz Schuster, Ulrich Wegmann, Winfried Kaiser

Proceedings Volume 1332, (1991) https://doi.org/10.1117/12.51047

KEYWORDS: Wavefronts, Interferometers, Visualization, Calibration, Holograms, Optical testing, Monochromatic aberrations, Video, Interferometry, Optics manufacturing

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Proceedings Article | 1 January 1991 Paper

High-precision interferometric testing of spherical mirrors with long radius of curvature

Klaus Freischlad, Michael Kuechel, Wolfgang Wiedmann, Winfried Kaiser, Maximilian Mayer

Proceedings Volume 1332, (1991) https://doi.org/10.1117/12.51046

KEYWORDS: Mirrors, Wavefronts, Interferometers, Interferometry, Spherical lenses, Calibration, Optical testing, Cameras, Monochromatic aberrations, Optical spheres

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Showing 5 of 22 publications

Conference Committee Involvement (2)

Advances in Metrology for X-Ray and EUV Optics II

30 August 2007 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics

2 August 2005 | San Diego, California, United States

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