CONFERENCE PROCEEDINGS
Advanced Search
Kwangwoo Kim
at Haedosa Corp
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 10 April 2024 Poster + Paper
Analysis software development for optical critical dimension based on RCWA and 3D modeling
Jiwon Lee, Minhyeok Lee, Shinyoung Ryu, Kwangwoo Kim, Jongjeong Kim, Tae Dong Kang
Proceedings Volume 12955, 129553U (2024) https://doi.org/10.1117/12.3022262
KEYWORDS: 3D modeling, 3D applications, Semiconductors, Deep learning, Metrology, Algorithm development, Mathematical optimization, Evolutionary algorithms, 3D metrology, Software development
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top