Dr. Lei Wang
at Huazhong Univ of Science and Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 14 February 2011 Paper
Wen Liu, Lei Wang, Ning Zhou, Yiwen Zhang, Fei Qiu, Zhimou Xu
Proceedings Volume 7927, 79270W (2011) https://doi.org/10.1117/12.876774
KEYWORDS: Nanoimprint lithography, Dense wavelength division multiplexing, Manufacturing, Semiconducting wafers, Nanolithography, Optics manufacturing, Electron beam lithography, Optical communications, Reactive ion etching, Optical alignment

Proceedings Article | 22 October 2010 Paper
Lei Wang, Wen Liu, Yiwen Zhang, Fei Qiu, Dingli Wang, Ning Zhou, Zhimou Xu
Proceedings Volume 7657, 765706 (2010) https://doi.org/10.1117/12.867573
KEYWORDS: Polymers, Photonic crystals, Nanolithography, Nanoimprint lithography, Ultraviolet radiation, Photoresist processing, Silicon, Semiconducting wafers, Particles, Optoelectronics

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