Dr. Masahiro Aoyagi Profile

Dr. Masahiro Aoyagi

Distinguished Professor at Kumamoto Univ

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Author

Publications (3)

Proceedings Article | 24 August 2001 Paper

Interlayer dielectric process for LSI circuits using positive photosensitive polyimide synthesized by block-copolymerization

Masahiro Aoyagi, Shigemasa Segawa, EunSil Jung, Taro Itatani, Masanori Komuro, Tsuenenori Sakamoto, Hiroshi Itatani, Masataka Miyamura, Shunichi Matsumoto

Proceedings Volume 4345, (2001) https://doi.org/10.1117/12.436832

KEYWORDS: Dielectrics, Silicon films, Semiconducting wafers, Capacitors, Capacitance, Silicon, Lithography, Heat treatments, Etching, Photomasks

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Proceedings Article | 7 July 1997 Paper

Fabrication process of superconducting integrated circuits with submicron Nb/AlOx/Nb junctions using electron-beam direct writing technique

Masahiro Aoyagi, Hiroshi Nakagawa

Proceedings Volume 3048, (1997) https://doi.org/10.1117/12.275805

KEYWORDS: Logic, Integrated circuits, Niobium, Lithography, Fabrication, Etching, Superconductors, Inductance, Electron beams, Plasma etching

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Proceedings Article | 13 October 1995 Paper

Noise properties of a mixer with SIS NbN quasi-particle tunnel junctions

Alexandre Karpov, B. Plathner, K. Gundlach, Masahiro Aoyagi, S. Takada

Proceedings Volume 2558, (1995) https://doi.org/10.1117/12.224232

KEYWORDS: Receivers, Oscillators, Niobium, Temperature metrology, Resistance, Double sideband modulation, Quasiparticles, Superconductors, Liquids, Amplifiers

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