Mr. Myoung-Ho Jung Profile

Myoung-Ho Jung

at SAMSUNG Electronics Co Ltd

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Author

Publications (3)

Proceedings Article | 12 May 2005 Paper

The application criterion of model-based optical proximity correction in a low k1 process

Doo-Youl Lee, In-Sung Kim, Sung-Gon Jung, Myoung-Ho Jung, Joo-On Park, Seok-Hwan Oh, Sang-Gyun Woo, Han-Ku Cho, Joo-Tae Moon

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.599013

KEYWORDS: Optical proximity correction, Model-based design, Resolution enhancement technologies, Lithography, Scanning electron microscopy, Photography, Process modeling, Photomasks, Scanners, Semiconducting wafers

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Proceedings Article | 14 May 2004 Paper

Performance of a SSQ-type ArF bilayer resist in 80-nm node DRAM line and space fabrication

Myoung-Ho Jung, Hyun-Woo Kim, Jin Hong, Sang-Gyun Woo, Han-Ku Cho, Woo-Sung Han

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.534882

KEYWORDS: Etching, Optical lithography, Silicon, Lithography, Photoresist processing, Scanners, Photomasks, Coating, Photoresist materials, Resistance

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Proceedings Article | 12 June 2003 Paper

Improvement of pattern collapse in sub-100-nm nodes

Myoung-Ho Jung, Sung-Ho Lee, Hyun-Woo Kim, Sang-Gyun Woo, Han-Ku Cho, Woo-Sung Han

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485115

KEYWORDS: Semiconducting wafers, Liquids, Coating, Lithography, Capillaries, Critical dimension metrology, Etching, Photoresist processing, Scanners, Semiconductors

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