Mr. Paul Jungmann Profile

Paul Jungmann

at Saxony

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Publications (1)

Proceedings Article | 28 April 2023 Paper

Design-aware virtual metrology and process recipe recommendation

Nathan Greeneltch, Haizhou Yin, J. Andres Torres, Melody Tao, Steven Lubin, Srividya Jayaram, Ivan Kissiov, Martin Niehoff, Marcus Wolf, Paul Jungmann, Todd Bailey

Proceedings Volume 12495, 124951V (2023) https://doi.org/10.1117/12.2661150

KEYWORDS: Data modeling, Semiconducting wafers, Metrology, Modeling, Machine learning, Fabrication, Data processing, Semiconductors, Process modeling, Deposition processes

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