Ms. Shaked Dror Profile

Shaked Dror

at Nova Measuring Instruments

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Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper

Spectral interferometry for TSV metrology in chiplet technology

Stefan Schoeche, Daniel Schmidt, Junwon Han, Shahid Butt, Katherine Sieg, Marjorie Cheng, Aron Cepler, Shaked Dror, Jacob Ofek, Ilya Osherov, Igor Turovets

Proceedings Volume 12955, 129551O (2024) https://doi.org/10.1117/12.3011748

KEYWORDS: Semiconducting wafers, Wafer level optics, Metrology, Silicon, Reactive ion etching, Reflection, Interferometry, Dielectrics, Polarization, Semiconductor manufacturing

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