Prof. Shun Zhou
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 16 January 2019 Paper
Proceedings Volume 10838, 1083814 (2019) https://doi.org/10.1117/12.2505365
KEYWORDS: Ion beams, Optical components, Sputter deposition, Ions, Silicon films, Deposition processes, Silica, Reflectivity, Silicon, Polishing

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