Dr. Victor Li Profile

Dr. Victor Li

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper

Nick Keller, Marc Poulingue, Ross Grynko, Troy Ribaudo, G. Andrew Antonelli, Victor Li, Marcello Ravasio, Delphine Le Cunff

Proceedings Volume 12955, 1295514 (2024) https://doi.org/10.1117/12.3010926

KEYWORDS: Simulations, Semiconducting wafers, Metrology, Nondestructive evaluation, Etching, Process control, Scatterometry

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Keywords/Phrases