Dr. Wenhui Wang
Engineer at Applied Materials
SPIE Involvement:
Author
Publications (24)

Proceedings Article | 26 April 2017 Presentation
Proceedings Volume 10147, 1014710 (2017) https://doi.org/10.1117/12.2261428
KEYWORDS: Optical proximity correction, Silicon photonics, High volume manufacturing, Sun, Optical lithography, Current controlled current source

Proceedings Article | 28 March 2017 Paper
Lei Sun, Tsunehito Kohyama, Kuniaki Takeda, Hiroto Nozawa, Yuji Asakawa, Taher Kagalwala, Granger Lobb, Frank Mont, Xintuo Dai, Shyam Pal, Wenhui Wang, Jongwook Kye, Francis Goodwin
Proceedings Volume 10145, 101452D (2017) https://doi.org/10.1117/12.2258623
KEYWORDS: Process control, Metrology, Optical metrology, Defect inspection, Inspection, Semiconducting wafers, Critical dimension metrology, Finite element methods, Wafer-level optics, Line edge roughness, Lithography, Optics manufacturing

Proceedings Article | 24 March 2016 Paper
Nihar Mohanty, Richard Farrell, Cheryl Periera, Kal Subhadeep, Elliott Franke, Jeffrey Smith, Akiteru Ko, Anton DeVilliers, Peter Biolsi, Lei Sun, Genevieve Beique, Erik Hosler, Erik Verdujn, Wenhui Wang, Cathy Labelle, Ryoung-han Kim
Proceedings Volume 9782, 97820Q (2016) https://doi.org/10.1117/12.2219259
KEYWORDS: Etching, Line edge roughness, Optical lithography, Back end of line, Chemistry, Front end of line, Lithography, Ions, Amorphous silicon, Extreme ultraviolet

Proceedings Article | 18 March 2016 Paper
Proceedings Volume 9778, 977822 (2016) https://doi.org/10.1117/12.2219665
KEYWORDS: Line edge roughness, Metrology, Lithography, Etching, Semiconductors, Scattering, Inspection, Critical dimension metrology, Photomasks, Roads, Extreme ultraviolet lithography

Proceedings Article | 15 March 2016 Paper
Proceedings Volume 9780, 97801S (2016) https://doi.org/10.1117/12.2229176
KEYWORDS: Line edge roughness, Line width roughness, Lithography, Optical lithography, Semiconductor manufacturing, Chemical mechanical planarization, Dielectrophoresis

SPIE Journal Paper | 13 July 2015
JM3, Vol. 14, Issue 03, 033501, (July 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.3.033501
KEYWORDS: Line edge roughness, Line width roughness, Semiconductors, Reactive ion etching, Double patterning technology, Lithography, Oxides, Extreme ultraviolet lithography, Optical inspection, Visualization

Proceedings Article | 19 March 2015 Paper
Proceedings Volume 9424, 942404 (2015) https://doi.org/10.1117/12.2086961
KEYWORDS: Line edge roughness, Line width roughness, Etching, Visualization, Lithography, Semiconductors, Optical inspection, Neodymium, Semiconducting wafers, Edge roughness

Proceedings Article | 13 March 2015 Paper
Proceedings Volume 9422, 94220T (2015) https://doi.org/10.1117/12.2086126
KEYWORDS: Semiconducting wafers, Etching, Line edge roughness, Line width roughness, Extreme ultraviolet lithography, Extreme ultraviolet, Critical dimension metrology, Scanning electron microscopy, Lithography, Scanners

Proceedings Article | 2 April 2014 Paper
Proceedings Volume 9050, 90502O (2014) https://doi.org/10.1117/12.2046580
KEYWORDS: Optical alignment, Monte Carlo methods, Overlay metrology, Optical lithography, Tolerancing, Lithography, Double patterning technology, Control systems, Manufacturing, Extreme ultraviolet lithography

SPIE Journal Paper | 17 December 2013 Open Access
JM3, Vol. 12, Issue 04, 042001, (December 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.4.042001
KEYWORDS: Point spread functions, Modulation transfer functions, Extreme ultraviolet lithography, Reticles, Extreme ultraviolet, Light scattering, Scattering, Photomasks, Scanning electron microscopy, Semiconducting wafers

Proceedings Article | 17 May 2011 Paper
Proceedings Volume 7753, 77535J (2011) https://doi.org/10.1117/12.885104
KEYWORDS: Sensors, Fiber optics sensors, Optical fibers, Traumatic brain injury, Silica, Multimode fibers, Ultrafast phenomena, Fabry–Perot interferometers, Silicon, Data processing

Proceedings Article | 16 May 2011 Paper
Proceedings Volume 8029, 80290V (2011) https://doi.org/10.1117/12.884278
KEYWORDS: Sensors, Fiber optics sensors, Silicon, Fiber optics, Traumatic brain injury, Polishing, Microelectromechanical systems, Wave propagation, Fabry–Perot interferometers, Interfaces

Proceedings Article | 27 April 2010 Paper
Proceedings Volume 7673, 76730K (2010) https://doi.org/10.1117/12.852617
KEYWORDS: Optical fibers, Raman spectroscopy, Quartz, Raman scattering, Femtosecond phenomena, Silica, Nanolithography, Nanostructures, Sensors, Scanning electron microscopy

Proceedings Article | 27 April 2010 Paper
Proceedings Volume 7673, 767307 (2010) https://doi.org/10.1117/12.852215
KEYWORDS: Sensors, Refractive index, Biosensors, Tapered optical fibers, Structured optical fibers, Cladding, Optical fibers, Single mode fibers, 3D modeling, Fiber optics sensors

Proceedings Article | 20 April 2010 Paper
Proceedings Volume 7677, 76770X (2010) https://doi.org/10.1117/12.852210
KEYWORDS: Absorption, Ultrasonography, Gold, Optical fibers, Nanoparticles, Pulsed laser operation, Mie scattering, Photoacoustic spectroscopy, Acoustics, Transform theory

Proceedings Article | 20 April 2010 Paper
Proceedings Volume 7677, 76770Y (2010) https://doi.org/10.1117/12.852590
KEYWORDS: Ultrasonography, Nanoparticles, Optical fibers, Gold, Receivers, Finite element methods, Pulsed laser operation, Optical simulations, Interfaces, Single mode fibers

Proceedings Article | 20 April 2010 Paper
Proceedings Volume 7677, 76770W (2010) https://doi.org/10.1117/12.852614
KEYWORDS: Sensors, Fiber optics sensors, Silicon, Optical sensors, Laser sources, Interferometers, Microelectromechanical systems, Sensor performance, Sensor calibration, Calibration

Proceedings Article | 24 February 2010 Paper
Yunfeng Ling, Nan Wu, Wenhui Wang, Leslie Farris, Byungki Kim, Xingwei Wang, Melisenda McDonald
Proceedings Volume 7559, 75590K (2010) https://doi.org/10.1117/12.842612
KEYWORDS: Light emitting diodes, Sensors, Thin films, Reflectance spectroscopy, Biosensors, Atomic force microscopy, Silica, Thin film devices, Spectrometers, Polymethylmethacrylate

Proceedings Article | 13 February 2010 Paper
Nan Wu, Wenhui Wang, Yunfeng Ling, Leslie Farris, Byungki Kim, Melisenda McDonald, Xingwei Wang
Proceedings Volume 7574, 75740I (2010) https://doi.org/10.1117/12.842034
KEYWORDS: Light emitting diodes, Sensors, Polymethylmethacrylate, Interferometry, Reflectivity, Biosensors, Silicon, Light sources, Reflection, Proteins

Proceedings Article | 4 October 2007 Paper
Proceedings Volume 6759, 675906 (2007) https://doi.org/10.1117/12.731130
KEYWORDS: Sensors, Nanoprobes, Biomedical optics, Manufacturing, Etching, Biosensing, Biological research, Fiber optics sensors, Near field scanning optical microscopy, Nanolithography

Proceedings Article | 10 January 2005 Paper
Proceedings Volume 5623, (2005) https://doi.org/10.1117/12.576059
KEYWORDS: Waveguides, Mirrors, Silicon, Integrated optics, Optical lithography, Phased array optics, Demultiplexers, Dense wavelength division multiplexing, Photomasks, Light wave propagation

SPIE Journal Paper | 1 November 2004
OE, Vol. 43, Issue 11, (November 2004) https://doi.org/10.1117/12.10.1117/1.1804545
KEYWORDS: Waveguides, Brain-machine interfaces, Silicon, Optical lithography, Silica, Single mode fibers, Structural design, Etching, Semiconducting wafers, Information science

Proceedings Article | 30 April 2004 Paper
Wenhui Wang, Yanzhe Tang, Liping Cui, Yaming Wu, Jianyi Yang, Yuelin Wang
Proceedings Volume 5279, (2004) https://doi.org/10.1117/12.521682
KEYWORDS: Mirrors, Waveguides, Etching, Anisotropic etching, Silicon, Dry etching, Wet etching, Photomasks, Oxides, Semiconducting wafers

Proceedings Article | 16 October 2001 Paper
Yanzhe Tang, WenHui Wang, Tie Li, Yuelin Wang
Proceedings Volume 4602, (2001) https://doi.org/10.1117/12.445700

Showing 5 of 24 publications
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