Dr. Xibin Zhou Profile

Dr. Xibin Zhou

Scientist

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Publications (4)

Proceedings Article | 24 March 2017 Presentation + Paper

New methodologies for lower-K1 EUV OPC and RET optimization

Kevin Hooker, Aram Kazarian, Xibin Zhou, Josh Tuttle, Guangming Xiao, Yunqiang Zhang, Kevin Lucas

Proceedings Volume 10143, 101431C (2017) https://doi.org/10.1117/12.2258186

KEYWORDS: Extreme ultraviolet, Optical lithography, Extreme ultraviolet lithography, Photomasks, Optical proximity correction, Resolution enhancement technologies, Reticles, SRAF, Semiconducting wafers, Lithography, Critical dimension metrology, Manufacturing, Atrial fibrillation

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Proceedings Article | 6 April 2015 Paper

Application of differential phase contrast imaging to EUV mask inspection: a numerical study

Xibin Zhou, Dominic Ashworth, Frank Goodwin, Kevin Cummings

Proceedings Volume 9422, 94221E (2015) https://doi.org/10.1117/12.2085945

KEYWORDS: Extreme ultraviolet, Inspection, Phase contrast, Photomasks, Extreme ultraviolet lithography, Defect inspection, Computer simulations, Infrared imaging, Phase shift keying, Defect detection

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Proceedings Article | 17 April 2014 Paper

AIS wavefront sensor: a robust optical test of exposure tools using localized wavefront curvature

Ryan Miyakawa, Xibin Zhou, Michael Goldstein, Dominic Ashworth, Kevin Cummings, Yu-Jen Fan, Yashesh Shroff, Greg Denbeaux, Yudhi Kandel, Patrick Naulleau

Proceedings Volume 9048, 90483A (2014) https://doi.org/10.1117/12.2048389

KEYWORDS: Artificial intelligence, Sensors, Reticles, Optical testing, Wavefronts, Wavefront sensors, Prototyping, Photomasks, Zernike polynomials, X-ray optics

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Proceedings Article | 1 April 2013 Paper

In situ optical testing of exposure tools via localized wavefront curvature sensing

Ryan Miyakawa, Xibin Zhou, Michael Goldstein, Dominic Ashworth, Kevin Cummings, Yu-Jen Fan, Yashesh Shroff, Gregory Denbeaux, Yudhi Kandel, Patrick Naulleau

Proceedings Volume 8679, 86790Q (2013) https://doi.org/10.1117/12.2013880

KEYWORDS: Optical testing, Wavefronts, Condition numbers, Sensors, Reticles, Zernike polynomials, Interferometry, X-ray optics, Wavefront sensors, Photomasks

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