Ms. Yaning Li Profile

Yaning Li

at Beijing Institute of Technology

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Publications (3)

Proceedings Article | 13 December 2021 Paper

Lithographic exposure latitude aware source and mask optimization

Lulu Zou, Lihui Liu, Yiyu Sun, Pengzhi Wei, Miao Yuan, Zhaoxuan Li, Yaning Li, Yanqiu Li

Proceedings Volume 12073, 1207302 (2021) https://doi.org/10.1117/12.2604844

KEYWORDS: Source mask optimization, Photomasks, Lithography, Resolution enhancement technologies, Semiconducting wafers, Lithium, Image processing, Electroluminescence, Optical proximity correction, Lithographic illumination

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Proceedings Article | 1 November 2021 Paper

Simulations of impacts on aerial image performance of defocus on different resolution enhancement technologies

Yaning Li, Yanqiu Li, Yiyu Sun, Pengzhi Wei

Proceedings Volume 12057, 1205747 (2021) https://doi.org/10.1117/12.2606845

KEYWORDS: Lithography, Resolution enhancement technologies, Photomasks, Source mask optimization, Semiconducting wafers, Polarization, Systems modeling, Image processing, Image enhancement, Thermal effects

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Proceedings Article | 1 November 2021 Paper

Fast lithographic source pupil optimization using difference of convex functions algorithm for transformed L1 penalty

Yiyu Sun, Yanqiu Li, Guanghui Liao, Miao Yuan, Yang Liu, Yaning Li, Lulu Zou, Lihui Liu

Proceedings Volume 12057, 120570I (2021) https://doi.org/10.1117/12.2604052

KEYWORDS: Lithography, Optimization (mathematics), Algorithm development, Imaging systems, Zernike polynomials, Compressed sensing, Semiconducting wafers, Photomasks, Modulation, Lithium

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