Dr. Qian Li
at Beijing Univ of Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 March 2023 Paper
Haiyan Zhang, Xiaojing Zhang, Qian Li, Tao Chen
Proceedings Volume 12600, 126000Q (2023) https://doi.org/10.1117/12.2674122
KEYWORDS: Laser ablation, Polydimethylsiloxane, Excimer lasers, Pulsed laser operation, Laser energy, Laser processing, Optical microscopes, Light absorption, Etching, Ultraviolet radiation

Proceedings Article | 29 April 2022 Paper
Qian Li, Haiyan Zhang, Rongjing Li, Tao Chen
Proceedings Volume 12255, 122550A (2022) https://doi.org/10.1117/12.2638682
KEYWORDS: Dry etching, Excimer lasers, Numerical simulations

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