This PDF file contains the front matter associated with SPIE Proceedings Volume 9282, including the Title Page, Copyright information, Table of Contents, and Conference Committee listing.

Waveguide holograms’ diffraction properties include peak-wavelength and diffraction efficiency, which play important role in determine their display performance. Based on the record and reconstruction theory of reflection waveguide holograms, a novel experimental method for testing diffraction properties is introduced and analyzed in this paper. An experiment is implemented and the result indicated that the measured value corresponds well with the designed value.

Detection of the subsurface damage depth in optical elements has significance on the subsequent material removal amount and improving element surface quality. The paper focuses on the subsurface damage of chemical-mechanical polished K9 specimen, and analyses the chemical-mechanical polishing mechanism and the cause of subsurface damage. A most suitable etchant is chosen and the step-by-step etching method is applied to measure the subsurface damage depth. A microscope is used to detect the damage morphology and the variation trend at different depth. Research shows that the subsurface damage caused by chemical-mechanical polishing is Hertz scratch, and the scratch quantity below surface presents a variation of zero-more-less-disappeared. The K9 specimen is polished for 3 min under the pressure of 2.5 Kgf and the spindle speed of 43139 r/min, thus resulting in a subsurface damage depth 15.3μm.

With the development of scientific technology, the requirement of aircraft level measurement technology is growing. The traditional measurement method and device have become the bottleneck of the production. The optical 3D large-size measurement technique, with the advantages of large measurement scale, high accuracy, high generality, high flexibility and automatic measurement, has becomes the primary technique for measuring the geometry of large-size object. For the actual problems existed in the routine the feature points of level measure technology, such as failure to meet required degree of accuracy, lower efficiency and slower speed of data processing, this paper puts forwards a new measuring scheme on the feature-points of aircraft level measure by using the optical measurement system of Laser radar. Initially, the measuring principle analysis has been performed based on the optical measurement system of Laser radar. The measurement scheme of the feature-points of level measure has been carried out on the basis of the principle. And then, it makes profound analysis of the key technology which includes the technology of CCD image alignment and station-moving measurement. After the actual detection, the combined error of each feature-point is less than the comprehensive error 0.3mm, meeting the measuring scheme of accuracy index. Analysis results demonstrate that design of the measuring scheme is effective, and can meet the requirements of actual applications.

Rapid inspection of a projection optics incorporated to 193 nm excimer-exposure system is important for 90 nm node and beyond IC manufacturing. The measurement accuracy of the projection optics, which comprises of dozens of refractive mirrors and has numerical aperture (NA) of 0.75, should be reach 2.0 nm RMS. The high brightness subnanometer accuracy spherical wave with NA of 0.75 is crucial to realize such high accuracy metrology. In this paper, we introduce a new illumination source for Shack-Hartmann wavefront sensor used to measure the wavefront error of the projection optics. The new illumination source, which contains many randomly distributed pinholes etched on a metal membrane, acts as many incoherent point sources and has high brightness. The diameters of the pinholes are in the same order as the wavelength of the illumination wave. The diffraction of the pinholes is calculated based on finite difference time domain (FDTD) method, the diffractive waves can cover the whole space behind the pinholes, the wavefront error of the diffracted spherical wave is about 10^-3λ RMS (λ=193 nm) within NA 0.75. The brightness is improved to N (Number of pinholes) times compared with single pinhole case.

Phase Diversity (PD) is a kind of wavefront sensing technology based on image collecting and restoration. Two images with different defocus are collected, and the Zernike coefficients of the system wavefront can be solved. In order to expand the traditional PD method from monochromatic light illumination to broadband light illumination condition, this paper focuses on the improvement of PD method. When there is broadband light illumination, the strategy of wavelength sampling is applied. Furthermore, when the width of spectrum is small, the monochromatic light assumption is proposed. The Structural Similarity (SSIM) is also selected to evaluate the quality of restored images. Results show that when the interval of wavelength sampling is less than 50nm, the residual errors of calculation are less than 0.02λ (RMS), and the images similarities are better than 0.96. Also, when the width of spectrum is less than 30nm, the monochromatic light assumption is carried out well. The residual errors of calculation are also less than 0.02λ (RMS), and the images similarities are better than 0.9.

In the paper the spectrum of realistic sunlight and pulse xenon lamp were compared to each other, the result shows that the infrared part of luminescence spectrum of xenon lamp without coating film occupies the total spectrum’s 57.4%, but the infrared part of the standard solar spectrum only reaches to 28.3%. The transmittance curve of pulse xenon lamp is got by fitting. Using appropriate method and coating film parameter, the film is done to pulse xenon lamp, and the negative film coefficient transmittance is 16% is got at 935nm central wavelength. At the range of 400-760nm wavelength the average transmittance is more than 86%, and the average transmittance is more than 96% at the range of 400-760nm wavelength. A portion of infrared light can be filtered after coating film. By the spectral testing of two coating film xenon lamp, it can be found that the spectral matching rate is from 0.792 to 1.176 and it is satisfied to A grade standard request. By using A and C grade pulse xenon lamp electric performance of 40.5W thin film cell is tested and the power value by C grade simulative light source is lower than real power for 11.2W. The result indicates the spectral matching rate of solar simulator is very important for cell electric performance.

The demands of the less-defective and high-flatness wafers are urgent in many wafer based technologies ranging from micro-electronics to the current photovoltaic industry. As the wafer becomes thinner and larger to cope with the advances in those industries, there is an increasing possibility of the emerging of crack and warp on the wafer surface. High-accuracy inspection of defects and profile are thus necessary to ensure the reliability of device. Phase measuring deflectometry(PMD) is a fast, cost-effective and high accuracy measurement technology which has been developed in recent years. As a slope measurement technology, PMD possesses a high sensitivity. Very small slope variation will lead to a large variation of the phase. PMD is very possible to have a good performance in the wafer inspection. In this paper, the requirements of the wafer inspection in the industries are discussed, and compatibility of PMD and those requirements is analyzed. In the experimental work, PMD gets the slope information of the wafer surface directly. The curvature or height information can be acquired simply by the derivation or integral of the slope. PMD is proved to make a superior result in high-precision defect detecting and shape measurement of wafer by the analysis of experiment results.

For optical surface measurement with higher accuracy, a simple method for removing surface figure deformation due to gravity was adopted and its principle research and error analysis were conducted. Based on optical flat supporting case, properties of gravitational deformation of the tested sample was analyzed by finite element method (FEM). In order to verify high accuracy of FEM analysis, a method which could remove the original surface deviation of the reference and the tested from the test results was adopted. According to the method, difference between theoretical and experimental results represented by Root-Mean-Square (RMS) value was only 0.404 nm. The result shown that the FEM analysis is accurate enough and the surface figure deformation due to gravity could be removed from test results efficiently. The method discussed here could benefit the high accuracy optical measurement.

In this paper, firstly we established the theoretical model of the relationship between correlation and wavelet vanishing moment of 1/f noise. Then we designed and built the 1/f noise measurement system for semiconductor laser diodes (LDs). Based on this, we introduced the measurement method of low-frequency electrical noise in semiconductor LDs and the extraction process of parameters associated. The wavelet transform decorrelation calculation is applied to the time-domain of the low-frequency noise signals, and the calculation and analysis of the relation between wavelet coefficients variances and scales are completed. The experimental results show that the noise wavelet coefficient correlation E and the vanishing moment N of wavelet function satisfy the decorrelation theoretical model at some scales, which implies that the low-frequency noise signals measured from the LDs belong to 1/f noise. Besides, the wavelet coefficient variance calculation results indicate that the noise measured in the experiments is 1/f noise from another aspect. Finally we theoretically proposed a new idea of semiconductor laser 1/f noise judging based on the methods above.

The cryogenic infrared target is a device used to correct the response linearity and non uniformity of infrared products (detector). Cryogenic infrared target needs wide temperature variation range as well as a stable and uniform temperature distribution in a larger area. The cryogenic infrared target also demands other excellent performances such as high temperature control precision and faster rate of temperature change. This paper discuss and analysis the working principle and key technology of the cryogenic infrared target. The analysis and test results showed that temperature of the divice can change from 80K to 300K and temperature uniformity was less than 0.2K and temperature precision was less than 0.2K and temperature stability was less than 0.2K/min. The structure of cryogenic infrared target was designed reasonably. Its index meets the design requirement.

We investigate a new metric power spectral density (PSD),for characterizing the performance of seeing-limited large telescope such as thirty meter telescope(TMT ). As the PSD is directly related to the performance of the atmosphere which plays an important role in ground based facilities, it represents the efficiency lose due to mid and high-spatial frequency components in observing time. The metric also properly counts for the optic error of the mirror itself such as the deviations from a perfect surface, and metrology measurement errors .The metric can multiply all the errors which differentiates from the traditional ones, such as RMS. We also numerically confirm this feature for Karman model atmosphere error multiplied with the sample of our vendor and the TMT M3.Additonaly, we discuss other pertinent feature of the PSD, including its relationship to Zernike aberration ,and RMS of wave front errors.

Fringe projection profilometry (FPP) has been widely used for 3-D surface shape measurement with the features of high accuracy, non-contact and fast speed. In FPP, the phase distribution is extracted from the captured distorted fringe pattern, and the height information could subsequently be obtained by the phase-height relation. In actual measurement, the captured pattern usually contains noises, which will influence the precision of the reconstructed result. In order to increase the accuracy of measurement, noise reduction procedure to these fringe patterns is required. The existing noise reducing methods (such as Fourier transform, Wavelet transform) have certain effect. However, they will eliminate some high frequencies generated by a surface with sharp change and make the image blurring. In this paper, we use Curvelet transform to enhance the accuracy of measurement in FPP. The Curvelet transform has the ability of multiscale and multidirection analysis in image processing. It has better descriptions of edges and detailed information of images. Simulations and the experimental results show that the Curvelet transform has an excellent performance in image denoising and it has a wonderful effect on accuracy enhancement of complex surface shape measurement in FPP.

To satisfy the needs for testing video processor of satellite remote sensing cameras, a design is provided to achieve a simulation and verification system of satellite remote sensing camera video processor based on dual-FPGA. The correctness of video processor FPGA logic can be verified even without CCD signals or analog to digital convertor. Two Xilinx Virtex FPGAs are adopted to make a center unit, the logic of A/D digital data generating and data processing are developed with VHDL. The RS-232 interface is used to receive commands from the host computer, and different types of data are generated and outputted depending on the commands. Experimental results show that the simulation and verification system is flexible and can work well. The simulation and verification system meets the requirements of testing video processors for several different types of satellite remote sensing cameras.

A simple method for planar mirror pendulum pose measurement is proposed. The method only needs a LCD screen and a CCD camera. LCD screen displays calibration patterns, and the virtual images (VIs) reflected by mirror are taken by the CCD camera. By camera calibration, the pose relationships between camera and VI coordinate systems can be determined. Thus the pendulum poses of the mirror is obtained according to coordinate transition and reflection principle. This method is simple and convenient, and has a big application potential in mirror pendulum pose measurement.

Compound eye is a multiple apertures imaging device, indicates that it can be applied for three-dimensional object detection. In our previous report, an artificial compound eye system was developed for 3D object detection. The system consists of a layer of plano-convex microlenses and a prism-like beam steering lens. An innovative multi-position calibration method is developed to relate the incident light rays and the relevant image points. Theoretically, one compound eye system alone is capable of 3D objects detection. However, the detection accuracy is limited due to the relatively small baseline between the adjacent microlenses. In this work, an equivalent large baseline is obtained by using a two compound eyes system. Preliminary experiments were performed to verify the improvement on the accuracy of 3D object detection. The experimental results with two compound eyes are compared with that obtained by only one compound eye. Experimental results show that the system with two compound eyes can detect an object much more accurately, indicating the feasibility and flexibility of the proposed method.

Imaging resolution, an important performance parameter of OCT systems, can be evaluated by suitable point spread function (PSF) phantoms. In this paper, we propose an innovative method to prepare PSF phantoms by mixing polystyrene microspheres of standard sizes with transparent polymer - polydimethylsiloxane (PDMS). Detailed procedures as well as specific design are described, and the produced PSF phantoms are employed to verify OCT system resolution performance by analyzing corresponding point spread functions. For comparison, images of the standard-size microspheres are provided by measuring the PSF phantoms with optical microscope.

In off-axis subapertures of most convex aspheres, astigmatism and coma dominate the aberrations with approximately quadratic and linear increase as the off-axis distance increases. A pair of counter-rotating computer generated hologram (CGH) plates is proposed to generate variable amount of Zernike terms Z4 and Z6, correcting most of the astigmatism and coma for subapertures located at different positions on surfaces of various aspheric shapes. The residual subaperture aberrations are then reduced within the vertical range of measurement of the interferometer, which enables near-null test of aspheres flexibly. The alignment tolerances for the near-null optics are given with optomechanical analysis. Accordingly a novel design for mounting and aligning the CGH plates is proposed which employs three concentric rigid rings. The CGH plate is mounted in the inner ring which is supported by two couples of ball-end screws in connection with the middle ring. The CGH plate along with the inner ring is hence able to be translated in X-axis and tipped by adjusting the screws. Similarly the middle ring is able to be translated in Y-axis and tilted by another two couples of screws orthogonally arranged and connected to the outer ring. This design is featured by the large center-through hole, compact size and capability of four degrees-of-freedom alignment (lateral shift and tip-tilt). It reduces the height measured in the direction of optical axis as much as possible, which is particularly advantageous for near-null test of convex aspheres. The CGH mounts are then mounted on a pair of center-through tables realizing counter-rotation. Alignment of the interferometer, the CGHs, the tables and the test surface is also discussed with a reasonable layout of the whole test system. The interferometer and the near-null optics are translated by a three-axis stage while the test mirror is rotated and tilted by two rotary tables. Experimental results are finally given to show the near-null subaperture test capability of the system for a convex even asphere.

We propose a sampling method to measure surface roughness of circular flat in this paper. The steps of this method are described in following. First, the number of sampling points is determined based on the radius of the circular flat; then the sampling points are selected by a certain angle in helical line; at last we use instrument like white light interferometer to measure the surface roughness of these sample points. The sampling method can effectively use the surface roughness of sampling points to estimate the surface roughness of the overall optical surface. According to mathematic derivation and simulation analysis, this method has a good sampling results, thus it can be widely used to measure the surface roughness of the circular flat.

Dual wavelength digital holography is an effective technique for the measurement of object profile with the discontinuities especially for an object of thickness greater than single wavelength. However; phase information of the two reconstructed images obtained by two different wavelengths usually can’t match precisely. As a result, signal to noise ratio (SNR) of reconstructed image of the equivalent wavelength increases and the real phase information of object can’t be measured accurately. It is because in space multiplex system, the focal plane asymmetry is produced due to the discrepancy between the two wavelengths through the splitter and CCD front lens, which worsens the mismatching of the two phase information. In this paper, the method of refocusing two holograms with autofocusing algorithm based on the gradient square criterion is proposed. The matching error can be decreased easily since two real distances for the reconstruction of object information are obtained. Considering the advantages of autofocusing algorithm, the phase of sample can be measured quickly with accuracy. This method provides a basis for real-time reconstruction of dual wavelength digital holography in micro-structure measurement field. Finally, the off-axis Fresnel digital holography is implemented with Mach-Zehnder setup to verify the effectiveness of the proposed method and the three-dimensional morphology of phase grating is measured successfully.

Freeform complex surfaces with steep variations in local areas cannot be fitted by analytical functions with high accuracy in the whole aperture in optics. A framework with a combination of Zernike polynomials as base function with radial basis function method is presented to improve reconstruction accuracy for freeform complex surfaces with circular aperture. The algorithm of the framework is analyzed, and the performance of the method is investigated and verified by numerical experiments. The proposed method is accurate and highly adaptable, which could be applied in modern optical manufacturing and measurement.

Radius of curvature (ROC) is one of the key parameters for optical elements and it is especially important for high quality optical system, in which the computer-aided integration is wildly used. ROC is one of the main input parameters and its measurement accuracy is a premise for high quality integration. In this paper, sub-micron ROC measurements are realized in a vertical interference workstation based on Fizeau interferometer. The error sources and uncertainty of the system are analyzed. Experiment results based on samples with difference ROC are presented and in accordance with the analysis. At last, a ROC comparing tests between the system and a three-coordinates measuring machine (CMM) are performed on a SiC ball to certify the workstation’s measurement uncertainty.

Digital holography is the product of the optical holography, computer technology and photoelectric detection technology, and has the advantage of high-speed, real-time, full field of view, non-contact and quantitative phase contrast imaging. However, the numerical aperture of the hologram is limited due to the smaller sensitive area of the photoelectric sensor and the larger pixel size, and it is uneasy to meet the practical requirement on the imaging resolution. An approach is presented to achieve the high-resolution digital holographic imaging based on a spatial light modulator(SLM). An amplitude spatial light modulator is placed between the object and the CCD in the lensless Fourier transform digital holographic imaging system. The distribution of a diffraction grating is loaded into the SLM. In this way, more light including the high-frequency content, diffracted from the object, can be collected by the CCD. The standard resolution target is used as the object. The reconstructed image is obtained by the Fresnel diffraction propagation algorithm, which exhibits three diffraction orders. The results show that the resolution is improved from 62.5 μm to 31.3 μm.

Video signal processor (VSP) is an important part for CCD remote sensing cameras, and also is the key part of light miniaturization design for cameras. We need to apply FPGAs to improve the level of integration for simplifying the video signal processor circuit. This paper introduces an integration design of FPGA software for video signal processor in a certain space remote sensing camera in detail. This design has accomplished the functions of integration in CCD timing control, integral time control, CCD data formatting and CCD image processing and correction on one single FPGA chip, which resolved the problem for miniaturization of video signal processor in remote sensing cameras. Currently, this camera has already launched successfully and obtained high quality remote sensing images, which made contribution to the miniaturizing remote sensing camera.

The nonlinearity of the interferometer is an essential error in nanoscale measurements influenced by anisotropic gain and nonorthogonality of imperfect polarization components. In this paper, polarization error and the corresponding nonlinearity correction method are studied. The paper is divided into two parts, in the first part, main research focuses on the polarization mixing effect of multi-pass interferometer, besides this, polarization beam splitter and retardation plate are also analyzed, then a final synthetic evaluation is obtained through Jones matrix. In the second part, a harmonic separation method of interferometer signals is researched, the method first decomposes signals into Fourier series, then uses least square fitting to estimate coefficients of main terms of series. In the correction process, the primary phase angle is obtained through coefficients of base series and trigonometric formulas; the finer phase angle is obtained through coefficients of harmonics and Taylor expansion. Experimental results demonstrate that the nonlinearity of homodyne interferometer is significantly reduced in nanometer measurements.

A 4+1 phase shifting algorithm is proposed for rotating-compensator spectroscopic ellipsometry (RCSE). The spectroscopic ellipsometric parameters are determined with five spectra, taken when the compensator is rotated at the detection angles of 0°, 45°, 90°, 135°, and an additional detection angle of 22.5°. There is no need to take the dark spectrum of the spectrometer for error correction using the new method, compared to Lee’s method [2] which also utilizes five spectra for RCSE. It also indicates the algorithm designed to suppress the second harmonic frequency component in traditional phase shifting algorithm is helpful to determine both fundamental and second harmonic frequency components. By taking an additional spectrum, both the two harmonic frequency components of spectra in RCSE are determined by the designed 4+1 phase shifting algorithm.

Interferometry is one of the most efficient techniques in surface figure testing while the transmission surface usually limits the accuracy. Besides, standard figure interferometers often have a typical aperture of about 150 mm diameter which can not satisfy the need of large optics calibration. A novel method for characterizing the absolute surface figure of long grazing-incidence optics used in synchrotron radiation beamlines is presented. We demonstrate oblique incidence interferometry to overcome the aperture limitation. Furthermore, multiple rotating measurements are used to remove the transmission surface errors. The new solution is simple and easy without dismantling the transmission flat throughout the calibration procedure. The theoretical derivation, experiment results and uncertainty analysis are presented.

With the development of science and technology, photoelectric equipment comprises visible system, infrared system, laser system and so on, integration, information and complication are higher than past. Parallelism and jumpiness of optical axis are important performance of photoelectric equipment,directly affect aim, ranging, orientation and so on. Jumpiness of optical axis directly affect hit precision of accurate point damage weapon, but we lack the facility which is used for testing this performance. In this paper, test system which is used fo testing parallelism and jumpiness of optical axis is devised, accurate aim isn’t necessary and data processing are digital in the course of testing parallelism, it can finish directly testing parallelism of multi-axes, aim axis and laser emission axis, parallelism of laser emission axis and laser receiving axis and first acuualizes jumpiness of optical axis of optical sighting device, it′s a universal test system.

Laser stealth is an important way of photoelectric stealth weapons systems. According to operational principle of laser range finder, we actively explore and study the stealth performance approval testing technology of laser stealth materials, and bring forward and establish the stealth performance field test methods of stealth efficiency evaluation. Through contrastive test of two kinds of materials, the method is correct and effective.

In this paper the mechanism of reflective fiber-optic vibration sensor has been researched by mathematical modeling and Simulation. Research shows that fiber structure, the numerical aperture and core diameter of fiber, can affect the performance of RIM-FOS. With the increase of the numerical aperture, the peak point and range of detection move forward, received power is not changed, sensitivity is improved; with the increase of core diameter of transmitting fiber, power peak and sensitivity decreases; along with the core diameter of receiving fiber increases, the peak power increases, the slope before sensitivity increased. According to the research results, the best SNR is obtained in an experimental system that the 62.5μm of transmitting fiber and 100μm core diameter of receiving fiber is adopted.

Ultraviolet irradiance meters are widely used in many areas such as medical treatment, epidemic prevention, energy conservation and environment protection, computers, manufacture, electronics, ageing of material and photo-electric effect, for testing ultraviolet irradiance intensity. So the accuracy of value directly affects the sterile control in hospital, treatment, the prevention level of CDC and the control accuracy of curing and aging in manufacturing industry etc. Because the display of ultraviolet irradiance meters is easy to change, in order to ensure the accuracy, it needs to be recalibrated after being used period of time. By the comparison with the standard ultraviolet irradiance meters, which are traceable to national benchmarks, we can acquire the correction factor to ensure that the instruments working under accurate status and giving the accurate measured data. This leads to an important question: what kind of testing device is more accurate and reliable? This article introduces the testing method and problems of the current testing device for ultraviolet irradiance meters. In order to solve these problems, we have developed a new three-dimensional automatic testing device. We introduce structure and working principle of this system and compare the advantages and disadvantages of two devices. In addition, we analyses the errors in the testing of ultraviolet irradiance meters.

In many industrial activities such as manufacturing and inspection, optical axis offsets measurement is an essential process for keeping and improving the quality of products. The laser autocollimation method is improved to detect the large angular displacement with high precision by using a re-imaging technology. A large optical screen made of frosted glass is located at the focal position of the objective lens instead of the detector. A precision CCD imaging system was employed to measure the displacement of the light spot on the optical screen. The sub-pixel position of center of the light spot can be obtained accurately through the centroid and Gaussian fit methods. The actual test results show that the total systematic error of the optical angle measuring instrument in the mode of measuring the range 8°×8° does not exceed 0.16′.

For performing infrared accurate measurement, It is necessary to calibrate infrared camera and spectrometer equipment field. Nowadays people generally use extend blackbody as standard radiation source. Since the outer environment of low temperature and wind field, blackbody general laboratory used is difficult to meet the requirement of field calibration. Therefore a portable field blackbody is specially developed. The temperature range of blackbody is 50 °C ~200 °C with effective radiation area 200mm×200mm. Using the effective insulation and windproof techniques, the blackbody can work at -20 °C to 40 °C environment. Basically meet the needs of infrared camera, spectrometer and other measuring equipment field calibration.

Computer-Aided Alignment (CAA) is an effective method for improving image quality of an optical system, which is implemented by aberration compensation technique. This paper studies some key techniques of CAA, including the mathematical model of CAA, the selecting of the aberration compensator, the establishment of sensitivity matrix and the solution of misalignment. A numerical simulation of CAA has been performed for a four-lens precision optical system to verify the ability and accuracy of the method. Comparisons of the image qualities between the pre-alignment and post alignment systems are also presented. These results indicate that the CAA method is feasible. It can not only meet the precision requirement, but also accelerate the convergence of alignment solutions. This method is realized by compensation among variables, so the variables are reduced and the time of alignment is saved.

A new initial alignment of MIMU based on CCD is proposed in this article to overcome problems of time consuming and low accuracy of the traditional HMS. By utilize the attitude information provided by CCD, MIMU can achieve initial alignment process and output real-time head attitude to compute line of sight. Simulation results indicated that the CCD measurement system can effectively reduce the wasting time of initial alignment and improve attitude measurement precision.

A method for the optical surface defects inspection based on fringe reflection is studied. The test system is composed of the fringe screen (a liquid crystal display, LCD), CCD camera and a computer. The intensity-modulated patterns are generated on the screens on both the horizontal and vertical directions respectively. The CCD records the pattern images via the tested surface. The phase and amplitude modulation are calculated by the phase-shifting technique. The defects location can be got from the amplitude modulation. Also the height of the defects can be gained by integration from the phase change caused by the defects. This method is simple and cheap. Compared with other techniques, this technique can get the three dimension information of the defects. The experimental results have confirmed the feasibility of this method.

In three dimensional detection of the rail shape by Fourier Transform profilometry (FTP), filtering is one of the key links before Fourier transform. The choice of filtering window decides the spectrum overlapping degree of deformed fringes, so as to decide the measurement precision of the rail shape. In this paper, based on wavelet ridge theory the size of the filter window is self-adaptive according to the frequency alternation of deformed fringes. And thus the optimum matching window size is decided, the frequency overlapping is furthest reduced and the measurement precision is improved. Simulation and experiments manifest that self-adaptive filtering can greatly enhance the precision in three dimensional detection, which offers a new thinking and method in rail shape recovery and defect detection.

The infrared (IR) target recognizing and tracking technique is widely applied to many fields such as industries, navigation, weapon controlling and guiding and so on. Its application in military field has become the research hotspot. The stability of target tracking is the most important in military applications. However, it is difficult to track the aerial target because of the complex background and noise interference, especially from long distance, which make tracking targets even harder. In this paper, a novel image tracking system is designed, which uses template matching algorithm combined with Kalman filter. Because of the noise in image, the presence of occlusion, and the deformation of tracked target, some tracking algorithms may fail. So it is the main idea in this paper to merge the advantages from the tracking algorithms, and track the target real time. The algorithm for weak small targets from the image is based on template matching algorithm. In order to overcome the problems related to the changes of unpredictable circumstance, Kalman filter tracking algorithm is used. For the disadvantage of template matching algorithm towards occasions in target tracking, such as target occlusion, drastic change of image intensity, the relevant solutions are proposed. In cases when the target is occluded or moves more than the operational limits of the tracking module, Kalman filter is used to predict the object location. Thus, automatic detection and tracking of target in real-time is achieved and the proposed method is more robust in target tracking. The results show that the algorithm can realize target tracking under complicated scenes. It also improves the tracking stability, capacity of anti-interfering and running efficiency.

A reliable and secure navigation system and assured autonomous capability of satellite are in high demand in case of emergencies in space. This paper introduces a novel autonomous orbit determination method for Middle-Earth-Orbit and Low-Earth-Orbit (MEO and LEO) satellite by observing space objects whose orbits are known. Generally, the geodetic satellites, such as LAGEOS and ETALONS, can be selected as the space objects here. The precision CCD camera on tracking gimbal can make a series of photos of the objects and surrounding stars when MEO and LEO satellite encounters the space objects. Then the information processor processes images and attains sightings and angular observations of space objects. Several clusters of such angular observations are incorporated into a batch least squares filter to obtain an orbit determination solution. This paper describes basic principle and builds integrated mathematical model. The accuracy of this method is analyzed by means of computer simulation. Then a simulant experiment system is built, and the experimental results demonstrate the feasibility and effectiveness of this method. The experimental results show that this method can attain the accuracy of 150 meters with angular observations of 1 arcsecond system error.

Fisheye lenses have the advantages of short focal length and large field of view. However, by using the “non-similar” imaging principle, they artificially introduce a large barrel distortion. In order to improve the quality of the images correction of distortion is required. This article analyzes the polar distortion correction model, raised a simple distortion coefficient calibration method and the use of bilinear interpolation method for gray level interpolation. Compared to other methods, this method is easier to reinforce and achieves high accuracy, and it can be easily implemented in the hardware system. At the end of the paper we introduced a device correction for a fisheye CCD camera. Based on the original data, a distortion correction model is established. In order to minimize the error, the correction was divided into three sections, and the image is well recovered.

When testing aspheric surface by computer generated hologram (CGH), there are some engineering problems in experiments. Within a lot of experiments, some unknown conditions appeared, and we analyzed two of them in detail and simulated them in Zemax. The unwanted diffraction orders maybe bring ghost image, and ring source is a simple method to eliminate it. The parallelism error of CGH substrate will bring a non-rotational symmetric error in test result, which is shown as coma. The size of the coma is related by parallelism error and the degree of the coma is related by the angle compared with the origin position. And a rotation method was presented to know the influence of parallelism error. After that, the projection distortion is expounded in detail and distortion calibration is successful to guide to enhance the precision of aspheric surface. These analysis results are very useful in practical engineering applications.

Due to its excellent performance, free-form large astronomical mirrors are playing an important role in astronomical optical telescope. Compared with traditional simple astronomical mirrors, the manufacture and the testing for such kind of mirrors are more complex and difficult since the influence of surface characteristics. In recent years, a gradientsensing technique based on fringe reflection (FR) is becoming a powerful tool for free-form large astronomical mirror testing owing to its advantages of high accuracy, fast speed, large dynamic range, etc. As an important part of FR, shape integration based on gradient information straightforwardly affects the accuracy of surface reconstruction. To overcome some problems of the existing shape integration methods, e.g. high-frequency information easily missing in Fourier integral method, a high sampling rate requirement in directly linear least-squares integral method based on Southwell’s model, etc., an improved shape-integral algorithm with hybrid iteration for surface reconstruction under sparse sampling considering the features of free-form large astronomical mirrors is proposed in this paper. Simulation results demonstrate the effectiveness of the proposed method.

Multitarget compounding system is a decisive subsystem of the infrared hardware-in-the-loop simulation system and the concentric structure with dimpled mirror is a potential multitarget compounding system. By inducting the off-axis aberration, the effect of off-axis aberration on broadening beamwidth was investigated for the practical multitarget compounding system. A critical abaxial distance was found when the axial spherical aberration was equal to the focal length of small mirrors. Outgoing beamwidth was increasing with abaxial distances when abaxial distance was over the critical distance. A laboratory multitarget compounding system was designed to demonstrate the effect.

The core of the computer aided alignment is aided alignment software installed. The accuracy of analysis and calculation by the software determines the optical adjustment’s precision directly. This paper analyzes the influence of misalignment variable’s precision through simulating the geometric parameters and the surface precision, then verified by some example. This method can help to improve the accuracy of optical adjustment and short the adjustment cycle.

In order to improve the dynamic evaluating capabilities of the inertial devices and realize the traceability in angular vibration, the angular vibration calibration devices are developed and it is very important to measure the angular vibration accurately for calibration devices. In this paper, a new diffraction grating heterodyne laser interferometer method was introduced for high-frequency and micro-amplitude angular-vibration measurement, which uses a differential and symmetrical optical-path arrangement. The proposed method has the advantages of high-precision, high anti-interference and convenient debugging, and could achieve the angular measurement resolution within 0.02″.

Large aperture optical have high risk of damage when woke on high flux laser. For avoid lethal damages breakdown the expensive large aperture optical, replace the optical that damaged before damage site increase to can’t repaired, we need precision measurement of optical surface damage sites size. The size of the optics which be detected is 400μm ×400μm, and the size of CCD array pixel is 4K×4K which we selected, so pixel resolution only 100μm of the Optical Damage Online Inspection system, it hard to measurement damage sites which size less than 100μm. This paper describes a method of radiometric calibration to measure online optical damage site that greater than 50μm by Optical Damage Online Inspection system. Numerical statement gray on CCD of different size damage sites by select a fixed variable of illumination intensity, shutter and numerical aperture of image-forming system. Fitting a curve with suitable function of gray and actual size, precision measure optical damage sites that greater than 50μm by the curve. Test results indicate that, the deviation less than 20% which measure size and actual size .This method settle problems of micro size damage site hard to measure online under the condition of long working distance and low optical resolution. At present, this method have used on Optical Damage Online Inspection system of high flux laser installation, it important significance for observation damage site size grown and accurately appraise the optical damage.

In this paper, a high-accuracy calibration method for angular measurement of deformed and curved Moiré patterns, based on template matching algorithm, is presented. We report a feasible and accurate method, based on Talbot interferometry and Moiré deflectometry, to measure long focal-length lenses. Theoretical analysis indicates that the precision of this method is mainly influenced by the angle of Moiré patterns. However, it’s difficult to obtain high-accuracy angle of Moiré patterns, since the Moiré patterns derived from experiment are constantly deformed or curved. We demonstrate a method, based on template matching algorithm, to calibrate deformed and curved Moiré patterns, thus their angle can be calculated fast and accurately in sub-pixel domain. Numerical analysis and simulation prove that the method mentioned above demonstrates high precision and stability, and experiment results show that the accuracy of the long focal lengths measurement is improved obviously.

Autonomous celestial navigation based on stellar refraction has attracted widespread attention for its high accuracy and full autonomy．In this navigation method, establishment of accurate stellar refraction measurement model is the fundament and key issue to achieve high accuracy navigation. However, the existing measurement models are limited due to the uncertainty of atmospheric parameters. Temperature, pressure and other factors which affect the stellar refraction within the height of earth's stratosphere are researched, and the varying model of atmosphere with altitude is derived on the basis of standard atmospheric data. Furthermore, a novel measurement model of stellar refraction in a continuous range of altitudes from 20 km to 50 km is produced by modifying the fixed altitude (25 km) measurement model, and equation of state with the orbit perturbations is established, then a simulation is performed using the improved Extended Kalman Filter. The results show that the new model improves the navigation accuracy, which has a certain practical application value.

A set of sectional FTIR is applied to study the reflecting characteristics of several surfaces to infrared emission. The standard infrared source is separated from the host of the FTIR and set in a right-angled triangle with the reflecting plate and the entrance to make the reflecting infrared emission can easily pass into the detector through the route. The reflecting infrared emission from the FTIR source is measured by the FTIR detector. The reflecting plate includes metal plate, mirror, wood block and so on. A high intensity standard infrared source cooled by air is accepted and the testing background is atmosphere. The infrared emission reflected by the plate from the standard source is tested one by one. By the experiment, mirror has a good performance to reflect infrared emission, which is much better than unpainted iron plate or painted wood block. Certainly, unpainted iron plate has stronger capacity to reflect infrared emission than painted wood block, etc. As a result, the smoother the surface is, the stronger the reflecting performance is. The reflecting performance of painted surface to infrared emission is poorer than unpainted one. The various painted surfaces have not a visible difference upon their reflecting performance to infrared emission although they are made from different materials.

According to the principle of linear superposition of quantum mechanics, the multimode entangled states (as stated below) is formed on the finite-dimensional(N+1) Hilbert space by linearly superposing three quantum states: the multimode complex conjugate coherent state (as stated below), multimode complex conjugate imaginary coherent state (as stated below) and multimode vacuum state (as stated below), and their difference squeezing properties of generalized nonlinear equal-power N-th power is studied by utilizing the general theory of multimode squeezed states. The results show that on the finite -dimensional Hilbert space, while some conditions are satisfied, the two quadratures of the multimode entangled states (as stated below) present the equal-power N-th power difference squeezing properties, but under some other conditions, the difference squeezing effects of two quadratures can be displayed at the same time. The squeezed depth or squeezed degree in this space is different from that on the full-dimensional Hilbert space. The later result is not in conformity with the uncertainty principle. It is called "two -sided〞difference squeezing.

Shack-Hartman wave sensor is applied widely in wave-front process with real-time and stable advantages. To increase the testing accuracy of Shack-Hartman sensor, the centroid testing accuracy must be increased first. But the centroid testing accuracy is decided by the detector performance, which is at the system focal plane. The testing accuracy will decrease with detector pixel size increasing. Based on micro-scanning system, the detector in Shack-Hartman wave sensor will receive four images of the wave-front under test. They are rebuilt to a single image after digital image procession. The centroid is calculated and wav-front is rebuilt by wave-front processor. The pixel distance is subdivided to 1/N along X and Y direction respectively with micro-scanning system. N*N is the detected image frames. The sub-pixel shifting images are rebuilt to a whole image after digital image procession. And the resolving power is realized to be increased finally. With application of micro-scanning in Shack-Hartman wave sensor, the system error due to detector accuracy in Shack-Hartman will be decreased. Consequently, the requirement on detector will be decreased. The resolving power of detector is improved greatly. As a result, the image quality testing accuracy of Shack-Hartman wave-front is improved. The image quality testing accuracy of traditional Shack-Hartman wave-front sensor will be increased within the original field of view. And the application range of Shack-Hartman wave sensor is also enlarged effectively.

Optical alignment machining is an effective method to ensure the co-axiality of optical system. The co-axiality accuracy is determined by optical-centering accuracy of single optical unit, which is determined by the rotating accuracy of lathe and the optical-centering judgment accuracy. When the rotating accuracy of 0.2um can be achieved, the leading error can be ignored. An axis-determination tool which is based on the principle of auto-collimation can be used to determine the only position of centerscope is designed. The only position is the position where the optical axis of centerscope is coincided with the rotating axis of the lathe. Also a new optical-centering judgment method is presented. A system which includes the axis-determination tool and the new optical-centering judgment method can enhance the optical-centering accuracy to 0.003mm.

The laser beam quality measurement has become a hot topic in the field of laser engineering nowadays. Based on the method of Hartmann-Shack, the four-wave lateral shearing interferometer is presented in this paper to achieve the laser beam shape parameters. The principle of shearing technology is described in detail. Parameters of semiconductor laser at 532nm and ZYGO interferometer laser are tested based on the method of four-wave lateral shearing interference and their test results are compared with the nominal parameters. As the results, the test results are basically consistent with the nominal value, which fully shows the feasibility of the four-wave lateral shearing interference method.

We have proposed a new method for improving angle measurement precision based on the principle of CCD laser collimation in this paper. First, through the control of the laser’s state, on or off, by the Digital Signal Processor (DSP), the collimation light and the background light can be sampled, individually. Second, with the comparison between the sampled value of the background light intensity and the threshold value which has been set in the DSP previously, the DSP can automatically control Complex Programmable Logic Device (CPLD) to adjust the light integral time of CCD to adapt to different environment background and the changeable scanning driver of CCD is realized. Last, by the digital wave filtering the impact of the background light on the collimation light can be removed. With the comprehensive application of the controlling technology of automatically changeable scanning driving, collimation light on or off, A/D conversion and adaptive filtering, the integration time of the collimation system can automatically adjust to the proper value according to the change of the environment and the impact of the background light on the collimation system can be well removed. The simulation results show that the new method can achieve the self-adaptable control with the change of the environment and can improve the measurement precision of the laser collimation system under the complex environment.

Arbitrary polarized beams, including homogeneously polarized beams and cylindrical vector beams, have been generated by an experimental setup with one phase-only liquid crystal spatial light modulator, and a four-path method was demonstrated to measure the polarization degree of detected beams. Besides, another method was proposed to measure the polarization directions of cylindrical vector beams. The polarized states can be calculated by controlling the spatial light modulator and optical intensity obtained from a CCD. The generation setup and detection methods have simple structure and low cost, and they are available for multi wavelength input beams, and the detection methods can realize real-time and on-line measurement.

The analysis of laser damage properties of films is the focus of most concern in recent years. Many properties of the film have been studied, but the surface accuracy of the substrates shouldn’t be ignored. TiO₂ films are prepared on K9 glass substrates with different surface accuracy by ion beam assistant deposition technique. The films’ surface morphology, microstructure and thickness are been analyzed. It shows that the substrates with different surface accuracy have some impact on thin film growth and make different micro-structures of thin film. According to the international standard requirements of the damage threshold, the films’ damage threshold is measured on the films’ laser-induced damage threshold test platform composed with 1064 nm Nd: YAG laser. The results indicate that the laser damage threshold of the film deposited on the substrate with the better surface accuracy is higher, and the substrate with high accuracy can improve the laser damage resistance of the film.

A scanning measurement system is constructed to measure the transmissivity of each site in large aperture optic components. This system enlarges the beam diameter of light source, and uses a computer-controlled scanning system to measure the transmissivity of optics. The experiments show that the testing accuracy and repeatability of this system both are better than ±0.1%.

Testing of aspheric surfaces by means of computer-generated holograms（CGHs）is well known. To perform an absolute test of rotationally symmetric aspheric surfaces, a specially designed computer-generated hologram (CGH) that reconstructs an aspherical wave as well as a spherical auxiliary wave. Since both phase functions have the same symmetry and their pattern is simultaneously encoded, we call this type of multiplex hologram a Twin-CGH. The spherical wave is used for calibration. The design principle of Twin-CGH is introduced in this paper. We mathematically analyze the Twin-CGH constructed by taking the phase corresponding to the linear combination of two weighted phase functions. We show that this Twin-CGH may be written as a new linear combination for the original phase functions with new weights. Then we absolutely test aspheric surfaces by Twin-CGH.

In the non-critical phase-matching (NCPM) along the Θ =90° direction, ADP and DKDP crystals which have many advantages, including a large effective nonlinear optical coefficient, a small PM angular sensitivity and non beam walk-off, at the non-critical phase-matching become the competitive candidates in the inertial confinement fusion(ICF) facility, so the reasonable temperature control of crystals has become more and more important .In this paper, the fluid-solid coupling models of ADP crystal and DKDP crystal which both have anisotropic thermal conductivity in the states of vacuum and non-vacuum were established firstly, and then simulated using the fluid analysis software Fluent. The results through the analysis show that the crystal surface temperature distribution is a ring shape, the temperature gradients in the direction of the optical axis both the crystals are 0.02°C and 0.01°C due to the air, the lowest temperature points of the crystals are both at the center of surface, and the temperatures are lower than 0.09°C and 0.05°C compared in the vacuum and non-vacuum environment, then propose two designs for heating apparatus.

In this article, in order to accurately measure the spectral transmittance of imaging lens used in InGaAs imaging apparatus, a simple device, which spectrum ranges from 400 nanometers to 2000 nanometers, based on double grating monochromator and self-collimating has been founded by using stable shortwave infrared radiant source, accurate double grating monochromator and telescope, stable silicon detector and cooled HgCdTe infrared detector. An imaging lens whose spectral transmittance has been known is measured on it. Comparing the test results to known data provided by manufacture, it is shown that the testing device founded in this article is competent to measure spectral transmittance of shortwave infrared imaging lens and which max relative deviation is no more than ±2.5%. It is worthwhile for selecting InGaAs image intensifier assembly and evaluating the quality of shortwave infrared imaging lens.

Different from traditional electrical readout infrared imaging, optical readout infrared imaging system readout the thermo-mechanical response of focal plane array via visible light. Due to the different parameters of the optical system, usually，the infrared thermal image pixel corresponding to the thermal element of focal plane array is not consistent. And the substrate-free focal plane array brings thermal crosstalk, the image blur. This manuscript analyzes the optical readout infrared imaging principle, proposes an one to one correspondence method between the infrared thermal image pixel and the thermal element of focal plane array, optimizes the digital infrared image by the thermal crosstalk on substrate-free focal plane array. Simulation and experiments show that the algorithm can effectively enhance the contours of the infrared image detail, enhancing image quality.

The principle of laser tracker was introduced. The site measuring uncertainty of the laser tracker was analyzed by moving instrument locations. Series experiments of single point and length were designed, the results provided a basis for the site measurement.

When radially polarized light beams focus through high numerical-aperture lens, there will be a very strong longitudinal component of the light field near the focus. And, under the condition of certain system parameters, they can shape a spot which is over the focusing spot of the diffraction limit, which are the superiorities that linearly polarized light and circularly polarized light do not have. Besides, what we have found in the experiment is that radially polarized femtosecond laser pulses own the same superiorities, which provides the basis for using the focusing characteristics of radially polarized light beams under the condition of shorter and more powerful laser pulses. So far, although people have studied a lot on radially polarized light beams, this kind of light beams’ focusing characters are rarely researched. What is worse, most research of its focusing characters still stays in the stage of theoretical simulation，and it seems that none of people have really studied it by the way of experiments. This article is precisely based on this. On the basis of predecessors' a lot of theoretical research, the article pays more attention on analyzing radially polarized light beams’ focusing character through experiments. What’s more, the article, based on femtosecond laser pulses, compares the differences of the focusing nature among linearly polarized light, circularly polarized light and radially polarized light. And it gets the conclusion that radially polarized femtosecond laser pulses have better focusing character in longitudinal light field, confirming the feasibility that radially polarized light beams can be used in the fields of pulling, catching, and accelerating particles, metal cutting and high-density storage.

In this paper, a high-accuracy calibration method for errors resulted from aberration in long focal length measurement, is presented. Generally, Gaussian Equation is used for calculation without consideration of the errors caused by aberration. However, the errors are the key factor affecting the accuracy in the measurement system of a large aperture and long focal length lens. We creatively introduce an effective way to calibrate the errors, with detailed analysis of the long focal length measurement based on divergent light and Talbot interferometry. Aberration errors are simulated by Zemax. Then, we achieve auto-correction with the help of Visual C++ software and the experimental results reveal that the relative accuracy is better than 0.01%.By comparing modified values with experimental results obtained in knife-edge testing measurement, the proposed method is proved to be highly effective and reliable.

Three-dimensional (3D) reconstruction is one of the most attractive research topics in photogrammetry and computer vision. Nowadays 3D reconstruction with simple and consumable equipment plays an important role. In this paper, a 3D reconstruction desktop system is built based on binocular stereo vision using a laser scanner. The hardware requirements are a simple commercial hand-held laser line projector and two common webcams for image acquisition. Generally, 3D reconstruction based on passive triangulation methods requires point correspondences among various viewpoints. The development of matching algorithms remains a challenging task in computer vision. In our proposal, with the help of a laser line projector, stereo correspondences are established robustly from epipolar geometry and the laser shadow on the scanned object. To establish correspondences more conveniently, epipolar rectification is employed using Bouguet’s method after stereo calibration with a printed chessboard. 3D coordinates of the observed points are worked out with rayray triangulation and reconstruction outliers are removed with the planarity constraint of the laser plane. Dense 3D point clouds are derived from multiple scans under different orientations. Each point cloud is derived by sweeping the laser plane across the object requiring 3D reconstruction. The Iterative Closest Point algorithm is employed to register the derived point clouds. Rigid body transformation between neighboring scans is obtained to get the complete 3D point cloud. Finally polygon meshes are reconstructed from the derived point cloud and color images are used in texture mapping to get a lifelike 3D model. Experiments show that our reconstruction method is simple and efficient.

High quality spherical wave, which is typically generated by the pinhole diffraction, is the core for calibration of the high-accuracy wavefront testing. The quality of the spherical wave diffracted by the pinhole is mainly determined by pinhole’s thickness, diameter, shape, material and illumination parameters. In this paper, we analyze the effect of illumination parameters such as the aberrations and numerical aperture (NA) on the quality of the spherical wave diffracted by the pinhole based on finite difference time domain (FDTD) method. The results show that the wavefront error of the spherical wave is about 8.4E-4 λ RMS when the NA of the illumination light is 0.75 and the diameter of the pinhole is 200 nm. Wavefront error of the diffracted spherical wave increases as the NA of the aberrant illumination beam increasing. Compare with astigmatism, defocus and spherical aberration, coma has the largest effect on the wavefront quality and is the most difficult aberration to filter. The conclusion supports important reference for determining the illumination parameters in calibration of high accuracy wavefront testing system.

Due to the distinctive merits of FBG, e.g., compact size and immune to electromagnetic, strain sensors based on FBG have attracted an increasing number of attentions in the field of structural health monitoring. But it is not easy to fabricate a strain sensor which can survive at high temperature, because normal material can not stand in a strain creep when the temperature is higher than 200°C. In this paper, a novel strain sensor consisting of a high temperature resistant FBG and a metal rhombus structure is presented and demonstrated for surface strain measurement. The FBG is bonded on the metal structure via a low softening point glass and pre-stretched about 2nm before it is bonded, so it can measure compress and stretch tension. The experimental result shows that the proposed strain sensor can survive at 300°C, and the average wavelength-strain sensitivity for compress and stretch, are 1.821 pm/μepsilon and 1.814 pm/μepsilon , respectively. A more insensitive material to temperature and more appropriate adhesive are needed to improve the linear relationship in the next step.

Fiber Bragg Grating (FBG) sensing technology has many applications, and it’s widely used in detection of temperature, strain and etc. Now the application of FBG sensor is limited to the temperature below 200°C owing to the so called High Temperature Erasing Phenomenon. Strain detection over 200°C is still an engineering challenge since high temperature has a bad influence on the sensor, testing equipment and test data, etc, thus effective measurement apparatus are needed to ensure the accuracy of the measurement over 200°C, but there are no suitable FBG strain experimental apparatus in high temperature to date. In this paper a high temperature FBG strain experimental apparatus has been designed to detect the strain in high temperature. In order to verify working condition of the high temperature FBG strain, an application of FBG strain sensing experiment was given in this paper. The high temperature FBG strain sensor was installed in the apparatus, the internal temperature of experimental apparatus was controlled from -20 to 300°C accurately, and strain loading was given by the counterweight, then the data was recorded through electrical resistance strain measurement and optical sensing interrogator. Experimental data result shows that the high temperature FBG strain experimental apparatus can work properly over 200°C. The design of the high temperature FBG strain experimental apparatus are demonstrated suitable for high temperature strain gauges and FBG strain sensors , etc, which can work under the temperature of -20 ~ 300°C, the strain of -1500 ~ +1500μepsilon and the wavelength resolution of 1pm.

The laser beam, which is eradiated by the active detecting system in the detecting process, will come in for scattering in multi-directions by atmospheric molecules and aerosol particles. The back-scattering transmits in the reverse direction and gets in the receiving system, which will bring severe interference to the target detecting, sometimes may even make the detector get into saturation. This paper built a physical model of the atmosphere back-scattering in the active detecting system, and analyzed the impact of several factors such as geometrically configure of the system ,LOS angle deflection, the detecting distance, the intensity of the noisy light, and analyzed the interfering ability of the back-scattering light to the target echo light and then validated the illation of the interfering ability by a short distance experiment indoor . The experiment get an appropriate result with the illation, which can use for reference for the design of system involving the transmitting of the laser light in the atmosphere such as laser active detecting, range measurement with laser and so on.

Now it’s more and more higher for the image quality of lithography systems .Due to the errors in the processing and assembly , the image quality of the traditional lens becomes lower and deviates from the theoretical value of the design. To improve image quality, it’s necessary to adjust some lens. The new objective lens having the adjustment mechanism and the measuring means were designed. A closed loop was designed to achieve the x, y, z, θx , θy of lens. Since the assembly errors existed, the theoretical relationship between the executive mechanism, measuring means and lens position needed to be calibrated. Ultimately we achieved about 150nm regulation accuracy of the x, y direction , 300nm regulation accuracy of z direction ,and 0.15'' regulation accuracy of the θx, θy direction .

A simultaneous phase-shifting interferometry(SPSI) based on the common-path Fizeau interferometer has been discussed.In this system,two orthogonal polarized beams, using as the reference beam and test beam ,are detached by a particular Wollaston prism at a very small angle,then four equal sub-beams are achieved by a combination of three non-polarizing beam splitters(NPBS),and the phase shifts are introduced by four polarizers whose polarization azimuths are 0°, 45°, 90°, 135° with the horizontal direction respectively,the four phase shift interferograms are collected simultaneously by controlling the CCDs working at the same time .The SPSI principle is studied at first,then is the error analysis, finally we emulate the process of surface recovery by four steps phase shifts algorithm,the results indicate that, to ensure the feasibility of the SPSI system, we have to control the polarization azimuth error of the polarizer in ± 0.5°.

Fast steering mirror (FSM) is one of the most important components in electro-optical tracking system and access to FSM model is the basis for controlling and fault diagnosis. This paper presented a correlation identification method based on Invert-Repeated m-sequence which can be used in the electro-optical tracking system to achieve the model of FSM under low sampling rate. Firstly, this article discussed the properties of the Invert-Repeated m-sequence and program implemented in matlab language, then analyzed the principle of correlation identification method based on Invert-Repeated m-sequence by utilizing Wiener-Hopf equation which is simple to achieve with strong anti-jamming capability and small perturbations on the system. Finally, a FSM model with the experiment data got by Dynamic Signal Analyzer was built in Matlab/Simulink and identified by the method mentioned in the paper. The experiment showed that correlation identification method which has certain actual application value, based on Invert-Repeated m-sequence can obtain more accurate recognition results even if the FSM system’s output signal contained large variance noise.

During the image processing, in order to solve the problem of target automatic extraction and tracking under multiple scenarios, we present a method of image complexity description, in this paper. Based on the global features about the appearance of gray level, the appearance of target and the randomness of image texture, this method describe the image complexity using the information entropy, the edge entropy and the texture entropy. The experiments show that this method could measure image complexity qualitatively. The complexity given by this method is according with the difficulty of the work to extract and track the target.

Optical thin film is the weak link in the entire laser systems; its resistant ability of laser induced damage is the bottleneck of laser systems which improve towards high-energy and high-power direction meanwhile. Owing to these, measurement of LIDT has been paid more and more attention to. The laser damage model of film was established. Based on this principle, criterion of photothermal deflection damage was determined. Experimental device based on laser damage model was set up. After experiments of SiO₂ films were conducted, beam offset under different energy was obtained. Comparative analysis of results between image processing method and photothermal deflection method were shown in the article. Experimental results show that photothermal deflection method is more sensitive than image method on measurement of film laser damage.

As an important part of machine vision, compound eye optical systems have the characteristics of high resolution and large FOV. By applying the compound eye optical systems to target detection and recognition, the contradiction between large FOV and high resolution in the traditional single aperture optical systems could be solved effectively and also the parallel processing ability of the optical systems could be sufficiently shown. In this paper, the imaging features of the compound eye optical systems are analyzed. After discussing the relationship between the FOV in each subsystem and the contact ratio of the FOV in the whole system, a method to define the FOV of the subsystem is presented. And a compound eye optical system is designed, which is based on the large FOV synthesized of multi-channels. The compound eye optical system consists with a central optical system and array subsystem, in which the array subsystem is used to capture the target. The high resolution image of the target could be achieved by the central optical system. With the advantage of small volume, light weight and rapid response speed, the optical system could detect the objects which are in 3km and FOV of 60°without any scanning device. The objects in the central field 2w=5.1°could be imaged with high resolution so that the objects could be recognized.

Infrared scene simulator is now widely used to simulate infrared scene practicality in the laboratory, which can greatly reduce the research cost of the optical electrical system and offer economical experiment environment. With the advantage of large dynamic range and high spatial resolution, dynamic infrared projection technology, which is the key part of the infrared scene simulator, based on digital micro-mirror device (DMD) has been rapidly developed and widely applied in recent years. In this paper, the principle of the digital micro-mirror device is briefly introduced and the characteristics of the DLP (Digital Light Procession) system based on digital micromirror device (DMD) are analyzed. The projection system worked at 8~12μm with 1024×768 pixel DMD is designed by ZEMAX. The MTF curve is close to the diffraction limited curve and the radius of the spot diagram is smaller than that of the airy disk. The result indicates that the system meets the design requirements.

This paper proposes an automatic method for IR and visible images matching without any assumption about initial alignment. This paper details our interest region extraction method for optical images and also the efficient region matching component. An improved shape context descriptor is constituted. The algorithm introduces in uniform pattern to make the extracted component decrease to 20 with rotation invariance Experiments using several IR and visible images illustrate the effectiveness of the proposed even when facing considerably geometric distortions. Even at different time and under special weather condition, it still has a higher average correct matching ratio than SURF and better robustness and it has a high efficiency, a short running time.

A large aperture uniform radiation source integrating sphere (URSIS) based on a 4m diameter internally illuminated integrating sphere with a 1.6m diameter exit port was designed and manufactured. This URSIS was used for pre-launch test and radiance calibration of large aperture imaging radiometers which fly aboard earth-borne remote satellites. Design criteria of the large aperture URSIS including sphere source radiance output, spatial radiance uniformity and radiance stability were presented. Integrating sphere internal lamp sources specifications and sphere coating selection were also concerned to suit the requirements of the multi-spectral-band imaging remote sensors. A new radiance calibration method of the URSIS based on Re-C blackbody was applied. The radiance calibration uncertainties varied from 2.8% to 3.5% with a coverage factor k=2 were achieved. The spectral radiance of the large aperture URSIS was characterized in the wavelength region from blue to near-infrared of spectrum. The spatial radiance uniformity of the large aperture URSIS was better than 99.0% and the stability was better than 0.4% over a period of 2 hours after an initial 30 minutes warm-up.

Long period fiber grating transmission is the core guided mode coupling the transmission of the cladding mode, when the ambient temperature, strain, refractive index, bending changed, the resonance peaks of the long-period fiber grating are very sensitive to changes. Long period fiber grating as sensing elements has a strong advantage and a wide range of applications. In this paper, we use a method of electro-thermal melting tapering to draw some of the columns cone on the fiber to form a periodic structure, and then prepare a long period fiber grating. On this basis, we use super-continuum light source and the spectrometer with a range of 600-1700nm wavelength, and build a period fiber grating bending experiments systems.

In this paper, we carry out a periodically taper experiment on standard single-mode optical fiber by electro-thermal fused taper system, and fabricate a long period fiber grating (LPFG). The resonance amplitude of the LPFG is -23dB. Then we have an experimental study about axial strain characteristics of the LPFG. In the axial stretching process of the grating, the period of the grating become larger, the diameter become smaller, and because of the photo-elastic effect, the refractive index of the core and the optical cladding change. Experimental results show that the resonant wavelength peak position of the LPFG had a good linear relationship with the axial strain. With the increase of axial strain, the resonance wavelength shift to short and the sensitivity is about -1.40pm/μepsilon.

Helical core optical fiber is used to achieve high power fiber laser output and polarization state control, and it has become a hot issue of current research due to its unique characteristics of chiral medium. The key difficult point is critical concentric alignment between the actual rotational center and the optical fiber core in helical core fiber manufacturing process. This paper proposed a new alignment method based on the coordinates of centroid. That is, injecting light to the main and sub fiber core which is fixed on the rotating clamping apparatus, acquiring two coordinates of the energy center in output field spot image with the help of the microscopic imaging system by using the squared weighted centroid method. X-axis is defined as the two fiber core connection direction, which perpendicular direction is Y-axis, and the origin is the center of main fiber core, so the correspondence between the main fiber core XY coordinate system and the rotating clamping apparatus X₀Y₀ coordinate system is available. Main fiber core rotation center coordinates X'Y' can be obtained by fitting, and the X₀Y₀ adjustment of clamping apparatus can be also acquired by coordinate transformation. Experimentally measured eccentricity error can be controlled around 8μm, which achieved concentricity precise adjustment. The experimental device has advantages of small size, stable performance, high positioning accuracy, and this method overcomes the key technical difficulties of the helical core optical fiber preparation.

The automatic and accurate focal length measurement of aviation camera lens is of great significance and practical value. The traditional measurement method depends on the human eye to read the scribed line on the focal plane of parallel light pipe by means of reading microscope. The method is of low efficiency and the measuring results are influenced by artificial factors easily. Our method used linear array solid-state image sensor instead of reading microscope to transfer the imaging size of specific object to be electrical signal pulse width, and used computer to measure the focal length automatically. In the process of measurement, the lens to be tested placed in front of the object lens of parallel light tube. A couple of scribed line on the surface of the parallel light pipe’s focal plane were imaging on the focal plane of the lens to be tested. Placed the linear CCD drive circuit on the image plane, the linear CCD can convert the light intensity distribution of one dimension signal into time series of electrical signals. After converting, a path of electrical signals is directly brought to the video monitor by image acquisition card for optical path adjustment and focusing. The other path of electrical signals is processed to obtain the pulse width corresponding to the scribed line by electrical circuit. The computer processed the pulse width and output focal length measurement result. Practical measurement results showed that the relative error was about 0.10%, which was in good agreement with the theory.

The aerial camera focal plane in the correct position is critical to the imaging quality. In order to adjust the aerial camera focal plane displacement caused in the process of maintenance, a new micro-displacement measuring system of aerial camera focal plane in view of the Michelson interferometer has been designed in this paper, which is based on the phase modulation principle, and uses the interference effect to realize the focal plane of the micro-displacement measurement. The system takes He-Ne laser as the light source, uses the Michelson interference mechanism to produce interference fringes, changes with the motion of the aerial camera focal plane interference fringes periodically, and records the periodicity of the change of the interference fringes to obtain the aerial camera plane displacement; Taking linear CCD and its driving system as the interference fringes picking up tool, relying on the frequency conversion and differentiating system, the system determines the moving direction of the focal plane. After data collecting, filtering, amplifying, threshold comparing, counting, CCD video signals of the interference fringes are sent into the computer processed automatically, and output the focal plane micro displacement results. As a result, the focal plane micro displacement can be measured automatically by this system. This system uses linear CCD as the interference fringes picking up tool, greatly improving the counting accuracy and eliminated the artificial counting error almost, improving the measurement accuracy of the system. The results of the experiments demonstrate that: the aerial camera focal plane displacement measurement accuracy is 0.2nm. While tests in the laboratory and flight show that aerial camera focal plane positioning is accurate and can satisfy the requirement of the aerial camera imaging.

Air material depot is a warehouse which store consumed all the parts and equipment vault of the plane. In order to ensure the various aviation equipment integrity of the backup piece rate, the inside temperature of depot must be controlled within a certain range. Therefore, the depot must be equipped a self-contained temperature real-time monitoring system. This paper presents a distributed temperature sensing alarm system to apply to real-time measure spatial distribution of temperature field. In order to eliminate influence to the scattering strength from the light source instability and the fiber bending splice loss and to improve temperature measurement accuracy, the system design used dual-channel dual- wavelength comparison method which make Anti-Stokes as signal channel and Stokes as a reference channel to collect signals of two channel respectively and detect the ratio of the two channels’ signals. The light of LD directional coupling to the sensing optical fiber in the temperature field to test, domain reflect light from the sensing optical fiber directional coupling to receive channel again, Rayleigh domain reflect light is filtered after optical filter, the Anti-Stokes and Stokes are both taken out, converted and magnified, the two signals is digitalized by A/D Converter, and written to the storage machine , which linear cumulative to the content of the storage unit, The distributed measurement of the temperature field to test is finished. The collected 2900 measuring points real-time on 2km of optical fiber. The spatial resolution of the system was 0.7m, measurement range was -20-370°C, and measurement error was ± 2 °C. All index of the system achieved the desired objective. To get an accurate temperature field spatial distribution and the information of temporal variation, the system enabled real-time temperature of aviation depot monitoring and early warning . As a new sensing technology, the distributed fiber optic sensor has the functions of self- calibration, self-calibration and self-test. Even when the fiber damaged, the distributed fiber optic sensor also can continue work and can detect the breakpoint location. The system can be applied to many engineering fields and has significant application value.

Air materiel depot is a warehouse which store consumed all the parts and equipment vault of the plane. In order to ensure the various aviation equipment integrity of the backup piece rate, the inside temperature of depot must be controlled within a certain range. Therefore, the depot must be equipped a self-contained temperature real-time monitoring system. This paper presents a distributed temperature sensing alarm system to apply to real-time measure spatial distribution of temperature field. In order to eliminate influence to the scattering strength from the light source instability and the fiber bending splice loss and to improve temperature measurement accuracy, the system design used dual-channel dual-wavelength comparison method which make Anti-Stokes as signal channel and Stokes as a reference channel to collect signals of two channel respectively and detect the ratio of the two channels’ signals. The light of LD directional coupling to the sensing optical fiber in the temperature field to test, domain reflect light from the sensing optical fiber directional coupling to receive channel again, Rayleigh domain reflect light is filtered after optical filter, the Anti-Stokes and Stokes are both taken out, converted and magnified, the two signals is digitalized by A/D Converter, and written to the storage machine , which linear cumulative to the content of the storage unit, The distributed measurement of the temperature field to test is finished. The collected 2900 measuring points real-time on 2km of optical fiber. The spatial resolution of the system was 0.7m, measurement range was -20-370 °C, and measurement error was ± 2 °C. All index of the system achieved the desired objective. To get an accurate temperature field spatial distribution and the information of temporal variation, the system enabled real-time temperature of aviation depot monitoring and early warning. As a new sensing technology, the distributed fiber optic sensor has the functions of self- calibration, self-calibration and self-test. Even when the fiber damaged, the distributed fiber optic sensor also can continue work and can detect the breakpoint location. The system can be applied to many engineering fields and has significant application value.

Advanced image sensor and powerful parallel data acquisition chip can be used to collect more detailed and comprehensive light field information. Using multiple single aperture and high resolution sensor record light field data, and processing the light field data real time, we can obtain wide field-of-view (FOV) and high resolution image. Wide FOV and high-resolution imaging has promising application in areas of navigation, surveillance and robotics. Qualityenhanced 3D rending, very high resolution depth map estimation, high dynamic-range and other applications we can obtained when we post-process these large light field data. The FOV and resolution are contradictions in traditional single aperture optic imaging system, and can’t be solved very well. We have designed a multi-camera light field data acquisition system, and optimized each sensor’s spatial location and relations. It can be used to wide FOV and high resolution real-time image. Using 5 megapixel CMOS sensors, and field programmable Gate Array (FPGA) acquisition light field data, paralleled processing and transmission to PC. A common clock signal is distributed to all of the cameras, and the precision of synchronization each camera achieved 40ns. Using 9 CMOSs build an initial system and obtained high resolution 360°×60° FOV image. It is intended to be flexible, modular and scalable, with much visibility and control over the cameras. In the system we used high speed dedicated camera interface CameraLink for system data transfer. The detail of the hardware architecture, its internal blocks, the algorithms, and the device calibration procedure are presented, along with imaging results.

Phase retrieval method can determine pupil phase directly from image formed by the optical system with no extra hardware. This method has attracted more and more attentions for its unique advantage, and has been successfully applied in many domains such as large telescope alignment, X-ray imaging and so on. In this paper, we propose a hybrid phase retrieval method for annular pupil, which is composed of two steps. In the first step, the estimated spot images is computed with analytic expression, while fast Fourier transform is used in the second step. This method can achieve high retrieval speed without sacrificing the retrieval accuracy. Numerical simulation is performed to validate this phase retrieval method.

The radiometric calibration of imaging spectrometer plays an import role for scientific application of spectral data. The radiometric calibration accuracy is influenced by many factors, such as the stability and uniformity of light source, the transfer precision of radiation standard and so on. But the deviation from the linear response mode and the polarization effect of the imaging spectrometer are always neglected. In this paper, the linear radiometric calibration model is constructed and the radiometric linear response capacity is test by adjusting electric gain, exposure time and radiance level. The linear polarizer and the sine function fitting algorithm are utilized to measure polarization effect. The integrating sphere calibration system is constructed in our Lab and its spectral radiance is calibrated by a well-characterized and extremely stable NIST traceable transfer spectroradiometer. Our manufactured convex grating imaging spectrometer is relative and absolute calibrated based on the integrating sphere calibration system. The relative radiometric calibration data is used to remove or reduce the radiometric response non-uniformity every pixel of imaging spectrometer while the absolute radiometric calibration is used to construct the relationship between the physical radiant of the scene and the digital number of the image. The calibration coefficients are acquired at ten radiance levels. The diffraction noise in the images can be corrected by the calibration coefficients and the uniform radiance image can be got. The calibration result shows that our manufactured imaging spectrometer with convex grating has 3.0% degree of polarization and the uncertainties of the relative and absolute radiometric calibrations are 2.4% and 5.6% respectively.

We introduced a high accurate subaperture testing method. This stitching method could reduce the interferometers deviation to the stitching results. This high accurate subaperture testing is determined by the data processing technique based on multiangle averaging method and Zernike polynomial fitting method. This technique does not require any assumptions about the surfaces under test. The experiment results shows that this high accurate subaperture testing method not only get the full absolute figure of the large mirrors but also can get the reference mirrors figure and calibrate it and the root mean square (rms) of residual figures between the two methods are ~0.80nm and ~0.87nm.

In an Adaptive Optics system, the Real Time Processor is as important as the human brain. Processing latency is a key index of Real Time Proceesors . In this paper, we propose a new processing method that significantly reduce the processing latency, which combined the design idea of multi-core parallel processing on space and time. In addition, by comparing the operating speed of CPU and the I/O speed of memory, we propose a reasonable memory allocation scheme. The experimental results show that the processing latency is 59.7us per frame using multi-core DSP TMS320C6678 as processing platform. The experiment is conducted on a system with 968 sub-apertures and 913 actuators.

With the development of modern precision optical systems, optical detecting system requires the accuracy of wavefront aberration to arrive to sub-nanometer level. When the incident field with polarization information, the polarization information will have a significant impact on the accuracy of measurement results by interacting with polarization-sensitive optical components in the lateral shearing interferometer. We propose the integrated interferometer wavefront sensor (IIWS) system, which is based on the traditional lateral shearing interferometer. This wavefront is sheared by a two-dimension diffraction grating in our system, the two-dimension diffraction grating is the key element to analysis the metrology performance. When using a different grating period and shearing direction, the wavefront shearing and phase shifting with polarization information will produce different error, moreover the impact will vary in the different diffraction orders. In this paper, calculation is based on the finite difference time domain (FDTD) algorithm. When calculation of different polarization state distribution of the incident field, the interaction analysis of shearing phase shifted grating and incidence light play an important role in error analysis. Finally we can get the effect of polarization for grating performance.

In recent years, with the development of positioning algorithm and FPGA, to achieve the camera positioning based on real-time implementation, rapidity, accuracy of FPGA has become a possibility by way of in-depth study of embedded hardware and dual camera positioning system, this thesis set up an infrared optical positioning system based on FPGA and SOPC system, which enables real-time positioning to mark points in space. Thesis completion include: (1) uses a CMOS sensor to extract the pixel of three objects with total feet, implemented through FPGA hardware driver, visible-light LED, used here as the target point of the instrument. (2) prior to extraction of the feature point coordinates, the image needs to be filtered to avoid affecting the physical properties of the system to bring the platform, where the median filtering. (3) Coordinate signs point to FPGA hardware circuit extraction, a new iterative threshold selection method for segmentation of images. Binary image is then segmented image tags, which calculates the coordinates of the feature points of the needle through the center of gravity method. (4) direct linear transformation (DLT) and extreme constraints method is applied to three-dimensional reconstruction of the plane array CMOS system space coordinates. using SOPC system on a chip here, taking advantage of dual-core computing systems, which let match and coordinate operations separately, thus increase processing speed.

Interaction is one of the key techniques of augmented reality (AR) maintenance guiding system. Because of the complexity of the maintenance guiding system’s image background and the high dimensionality of gesture characteristics, the whole process of gesture recognition can be divided into three stages which are gesture segmentation, gesture characteristic feature modeling and trick recognition. In segmentation stage, for solving the misrecognition of skin-like region, a segmentation algorithm combing background mode and skin color to preclude some skin-like regions is adopted. In gesture characteristic feature modeling of image attributes stage, plenty of characteristic features are analyzed and acquired, such as structure characteristics, Hu invariant moments features and Fourier descriptor. In trick recognition stage, a classifier based on Support Vector Machine (SVM) is introduced into the augmented reality maintenance guiding process. SVM is a novel learning method based on statistical learning theory, processing academic foundation and excellent learning ability, having a lot of issues in machine learning area and special advantages in dealing with small samples, non-linear pattern recognition at high dimension. The gesture recognition of augmented reality maintenance guiding system is realized by SVM after the granulation of all the characteristic features. The experimental results of the simulation of number gesture recognition and its application in augmented reality maintenance guiding system show that the real-time performance and robustness of gesture recognition of AR maintenance guiding system can be greatly enhanced by improved SVM.

In order to avoid the phenomenon of some image information were lost, which is due to the jamming signals, such as incident laser, make the pixels dot on CCD saturated. In this article a device of optical-mechanical structure was designed, which utilized the DMD (Digital Micro mirror Device) to modulate the image. The DMD reflection imaging optical system adopts the telecentric light path. However, because the design is not only required to guarantee a 66° angle between the optical axis of the relay optics and the DMD, but also to ensure that the optical axis of the projection system keeps parallel with the perpendicular bisector of the micro-mirror which is in the "flat" state, so the TIR prism is introduced，and making the relay optics and the DMD satisfy the optical institution’s requirements. In this paper, a mechanical structure of the imaging optical system was designed and at the meanwhile the lens assembly has been well connected and fixed and fine-tuned by detailed structural design, which included the tilt decentered lens, wedge flanges, prisms. By optimizing the design, the issues of mutual restraint between the inverting optical system and the projecting system were well resolved, and prevented the blocking of the two systems. In addition, the structure size of the whole DMD reflection imaging optical system was minimized; it reduced the energy loss and ensured the image quality.

The radius of curvature is one of the most important parameters to determine the properties of spherical surfaces. Based on the interferometric method, the importance of thermal analysis of spherical optical elements is stated in the paper. And then using different material, such as K9 and fused silica, the change of the curvature radius of spherical elements in different static temperature field is calculated and analyzed theoretically in the change of sag and surface. Finally, the theoretic results and simulated results by ANSYS have been compared. It is found that the radius of curvature of spherical optical elements is not only connected with the magnitude and direction of the temperature gradient, but also directly connected with material and structural parameters.

The image plane illumination nonuniformity caused by optical system or detector will affect the detection precision of photoelectric imaging system, especially in image guidance, positioning and recognition. An image plane illumination uniformity measurement device was set up, which was characteristiced of high uniformity and wide dynamic range. The device was composed of an asymmetric integrating sphere，the image collection and processing system, as well as the electrical control system.The asymmetric integrating sphere had two different radius,which was respectively 800mm and 1000mm.The spectral region was （0.4~1.1）μm, the illumination range was (1×10^-4~2×10⁴)lx. The image collection and processing system had two different acquisition card,which were respectively used for analog and digital signals. The software can process for dynamic image or static image. The TracePro software was used to make a internal ray tracing of integrating sphere, the illumination uniformity at the export was simulated for the size of 330mm×230mm and Φ 100mm export, the results were respectively 97.95% and 98.33%. Then,an illuminometer was used to measure the actual illumination uniformity of integrating sphere, the result was shown the actual illumination uniformity was 98.8%. Finally, a visible photoelectric imaging system was tested ,and three different uniformity indicators results were given.

With the development of photoelectric detection technology, machine vision has a wider use in the field of industry. The paper mainly introduces auto lamps tester calibrator measuring system, of which CCD image sampling system is the core. Also, it shows the measuring principle of optical axial angle and light intensity, and proves the linear relationship between calibrator’s facula illumination and image plane illumination. The paper provides an important specification of CCD imaging system. Image processing by MATLAB can get flare’s geometric midpoint and average gray level. By fitting the statistics via the method of the least square, we can get regression equation of illumination and gray level. It analyzes the error of experimental result of measurement system, and gives the standard uncertainty of synthesis and the resource of optical axial angle. Optical axial angle’s average measuring accuracy is controlled within 40′′. The whole testing process uses digital means instead of artificial factors, which has higher accuracy, more repeatability and better mentality than any other measuring systems.

MRTD is an important indicator to measure the imaging performance of infrared camera. In the traditional laboratory test, blackbody is used as simulated heat source which is not only expensive and bulky but also difficult to meet field testing requirements of online automatic infrared camera MRTD. To solve this problem, this paper introduces a new detection device for MRTD, which uses LED as a simulation heat source and branded plated zinc sulfide glass carved four-bar target as a simulation target. By using high temperature adaptability cassegrain collimation system, the target is simulated to be distance-infinite so that it can be observed by the human eyes to complete the subjective test, or collected to complete objective measurement by image processing. This method will use LED to replace blackbody. The color temperature of LED is calibrated by thermal imager, thereby, the relation curve between the LED temperature controlling current and the blackbody simulation temperature difference is established, accurately achieved the temperature control of the infrared target. Experimental results show that the accuracy of the device in field testing of thermal imager MRTD can be limited within 0.1K, which greatly reduces the cost to meet the project requirements with a wide application value.

The authors develop an intelligent testing instrument of 1.06μm pulse laser rangefinder anti-jamming performance. The authors present the testing system which is divided into collimating optical system, opto-electronic conversion circuit, mainly-controlling circuit, driving circuit, multi-beams simulated source and computer interface. Based on the testing instrument above, the authors present and research several key techniques: To generate simulated ranging/jamming echoes, the authors present and develop the mainly-controlling circuit which is built with FPGA chip and additional circuits; meanwhile, the authors also develop a new type of multi-beams diode which can be the simulated source of the testing instrument; According to power supply characteristics of multi-beams diode, the authors present and develop a corresponding common cathode driving circuit. The anti-jamming performance testing experimental data shows that the testing result has higher precision.

Causes of locomotive relaxation are discussed. Alarm system against locomotive driving wheel flaccidity is designed by means of techniques of infrared temperature measurement and Hall sensor measurement. The design scheme of the system, the principle of detecting locomotive driving wheel flaccidity with temperature and Hall sensor is introduced, threshold temperature of infrared alarm is determined. The circuit system is designed by microcontroller technology and the software is designed with the assembly language. The experiment of measuring the flaccid displacement with Hall sensor measurement is simulated. The results show that the system runs well with high reliability and low cost, which has a wide prospect of application and popularization.

In this paper, a low-light-level panoramic imaging system was designed based on the domestic second generation semi low-light-level tube. It has a waveband of 0.4 μm to 0.9μm, an effective focal length of 2.43mm, a working F-number of 1.5, and a field of view 30°～100°. Simulation results show that in the entire field of view, the f-θ distortion is less than 6%. The value of the MTF at 24 lp/mm is greater than 0.3. A mechanical structure supporting was designed. The stray light of this imaging system with its mechanical structure supporting was theoretical analyzed by using the software ZEMAX. A actual measurement was also carried out by a France stray light measuring instrument REFLET-180. The actual measurement results match with the theoretical results well in the simulation accuracy that verify the correctness of theoretical analysis and prove the feasibility of system design.

Since multi-cameras images involve much differences in spatial characteristics and spectral characteristics, so it is full of difficulties in the image registration. According to the different characteristics of the multi-cameras images, this paper proposed a new algorithm of sub-pixel image registration based on Harris corner and Scale Invariant Features Transform (SIFT) descriptor. The algorithm consists of three procedures: feature detection, pixel-level registration and sub-pixel-level registration. Firstly, the Harris algorithm was selected to extract the feature corners and determine the main direction of the Harris corners. Secondly, the SIFT descriptor was chose to describe the key points. Then, feature points acquired on matching by the two-way nearest neighbor algorithm. Finally, in the sub-pixel-level registration process, we carry out interpolation in the neighborhood of the pixel-level matching points. Then the pixel-level registration is taken once again. The experimental results show that, the proposed algorithm is accurate, efficient, and retains the rotational invariance of the SIFT descriptor. What’s more, processing speed is significantly increased.

The resolution of the camera and the detection sensitivity is increasing day by day to make it possible to use on observing deep space small target. In order to satisfy the commercial camera observing the stars background targets in high dynamic image fusion and image matching in high precision and rapid extraction star location of the application requirements, analyzed the influence of different noise on star positioning accuracy, preprocessing, and then puts forward the star selection method for image registration applications, finally completed the star locating and used the altitude angle and azimuth of stars in actual stars map to analyze the accuracy of extraction.

The concrete may be damaged because there are freeze-thaw cycles between winter and summer in cold regions. Strain is an alternative parameter which can be used to describe deformation. In this paper, the fiber bragg gratings(FBG) were used to concrete safety monitoring. The strain and temperature sensing properties have been studied. The fiber reinforced polymers (FRP) were used for the packaged techniques of FBG sensors. The neural network was applied to temperature compensation for FBG sensors.

Laser driving gun missile guidance type beam of laser information field formed by any link failure or reduced stability will directly lead to ballistic or miss out of control, and based on this, this paper designed the driving beam of laser guided missile guidance beam type forming device modulation and zoom mechanism, in order to make the missile can recognize its position in the laser beam, laser beam gun missile, by means of spatial encoding of the laser beam laser beam into information after forming device, a surface to achieve the purpose of precision guidance.

The phase retrieval hybrid algorithm based on gradient search algorithm and GS algorithm is designed for surface testing of the high dynamic range error beyond one wavelength after the rough polish process. Phase retrieval is a wave front sensing method that uses the intensity distribution to reconstruct the phase distribution of optical field. In the rough polish process of optical surface testing, there is the problem of phase wrapping caused by the high dynamic range error, which makes it hard to be measured by interferometers. In this condition, infrared interferometers are widely used for optical testing, but the operation of infrared interferometer is complicated because of the invisibility of infrared light and it’s very sensitive to the temperature, vibration and turbulence. The phase retrieval hybrid algorithm derives from gradient search algorithm and GS algorithm, aiming to solve the problem of phase wrapping caused by the high dynamic range error. Firstly, phase distribution is described by Zernike polynomials and the coefficients of Zernike polynomials are optimized by the gradient search algorithm to retrieve the low frequency error beyond one wavelength. Then GS algorithm is used to retrieve the high frequency error of small value. In the simulated calculation, the hybrid algorithm is used for surface testing of a spherical mirror with PV 2.42λ , RMS 0.41λ . The retrieved surface is PV 2.53λ , RMS 0.42λ .The simulation result shows that the hybrid algorithm is effective and accurate for optical surface testing of high dynamic range error.

A series of vibration source from the EAST tokamak complicated experimental environment would result in the laser path misalignment and the collected scattered laser signal attenuation, which leads to a measurement error of the Thomson Scattering (TS) diagnostics system. Two methods have been designed for the vibration analysis of the TS diagnostics optical transmission system, a passive one and an active one. The optical transmission system contains of a double deck optical table with 4 reflectors and a photon collection system. The vibration analysis includes 4 points of reflectors along the laser path, 1 point of the photon collection system, and the ground of EAST experimental hall. The passive method used a vibration spectrum analyzer and 7 vertical speed sensors measuring the standard deviation of the vibration noise, which refers to the virtual value of vibration, and a data analysis system. The active method used a hammer to simulate the vibration source of the experimental hall ground, and 15 accelerometers to measure the three-dimensional vibration spectrum of 5 points along the optical transmission system. The vibration isolation efficiency (IE) of the optical transmission system has been presented, and the vibration asynchrony of the 5 points also has been observed. The results of two methods are comparatively studied, and the active one is considered to be more credible.

The measuring principle of laser tracking system was introduced. The aircraft level measurement was completed by establish the measurement datum mark, select public sites, set up the aircraft coordinate system and transfer stations. Laser tracking measurement technology improved the work efficiency and ensured the installation precision of key components.

In this paper, a fast, reliable and accurate quantitative detection method for the colloidal gold immunochromatographic strip(GICA) is presented. An image acquisition device which is mainly composed of annular LED source, zoom ratio lens, and 10bit CMOS image sensors with 54.5dB SNR is designed for the detection. Firstly, the test line is extracted from the strip window through using the H component peak points of the HSV space as the clustering centers via the Fuzzy C-Means(FCM) clustering method. Then, a two dimensional eigenvalue composed with the hue(H) and saturation(S) of HSV space was proposed to improve the accuracy of the quantitative detection. At last, the experiment of human chorionic gonadotropin(HCG) with the concentration range 0-500mIU/mL is carried out. The results show that the linear correlation coefficient between this method and optical density(OD) values measured by the fiber optical sensor reach 96.74%. Meanwhile, the linearity of fitting curve constructed with concentration was greater than 95.00%.

An imaging polarimeter is developed for measuring polarization properties of hyper number aperture (NA) lithography tools, which can be represented by stokes entrance-pupil, stokes exit-pupil and mueller pupil of projection optics. This imaging polarimeter is optimized from the following three aspects. Firstly, a new method is proposed to measure stokes entrance-pupil of projection optics. It employs a rotating-waveplate and a fixed-polarizer as polarization state analyzer (PSA). Compared to the method proposed by Nomura, the number of measurements is reduced from 16 to 4 times. Additionally, the large incident angle in the mask plane leads to unacceptable retardation error of conventional waveplate, which terribly influent the measurement accuracy of the imaging polarimeter. Therefore, the imaging polarimeter can be optimized by employing a wide-view-angle (WVA) waveplate composed of quartz and sapphire plates. An example of 632.8nm WVA λ/4 waveplate is designed based on least square algorithm, which is firstly introduced to calculate the thicknesses of four crystal plates. Simulation result shows that the retardation error is less than 0.3° for incident angle within 20°. Thirdly, the WVA waveplate is successfully fabricated and its retardation is calibrated by senarmont method. Measurement data is contributed to eliminate the uncertainty of retardation and thus improves the performance of the imaging polarimeter. Because of the lack of lithography equipment, the imaging polarimeter is preliminarily tested in the visible optical system with a He-Ne laser. Stokes entrance-pupil, stokes exit-pupil and mueller pupil of projection optics are all measured with quite enough measurement repeatability.

For characteristic of a lithographic lens, wide field, a series of coefficients of Zernike polynomial cannot express the characteristic of aberration of the whole system．In this paper, we relate coefficient of Zernike polynomial to field coordinates by introducing double Zernike polynomial to represent field dependent aberrations of lithographic lens. The new aberration function is a sum of some four dimensions polynomial, which consist of fringe Zernike of pupil coordinates and field coordinates. We emulate the manufacturing error of lithographic lens by code V, a software of optical design, and fit a set of double Zernike polynomial coefficients by using single Zernike coefficients of a lot of field points to represent the global aberration of lithographic lens.

Baffle, especially the baffle with vanes, is a key element for stray light suppression of an optical system. In order to get well performance of stray light suppression, the long baffles are needed for some optical systems, such as Reflective Cassegrain System. However, the volume of the long baffle, which is not adaptive to the uses in the space environment, is too large. Therefore, a method of which the deployable structure is adopted in the baffle of the optical system is advanced innovatively. And a self-deployable baffle with vanes, which is able to stay in contraction state until it is working and deploy into long baffle state as required rapidly, is designed. The novel baffle in this paper is able to ensure good performance of the baffle with vanes and solve the problem of the baffle used in the space environment. Then, the performance of the tape spring is computed.

Based on microscopic imaging and sub-aperture stitching technology, Surface defect detection system realizes the automatic quantitative detection of submicron defects on the macroscopic surface of optical components, and solves quality control problems of numerous large- aperture precision optical components in ICF (Inertial Confinement Fusion) system. In order to improve the testing efficiency and reduce the number of sub-aperture images, the large format CCD (charged-coupled device) camera is employed to expand the field of view of the system. Large format CCD cameras are usually mosaicked by multi-channel CCD chips, but the differences among the intensity-grayscale functions of different channels will lead to the obvious gray gap among different regions of image. It may cause the shortening and fracture of defects in the process of the image binarization , and thereby lead to the misjudgment of defects. This paper analyzes the different gray characteristics in unbalance images, establishes gray matrix mode of image pixels, and finally proposes a new method to correct the gray gap of CCD self-adaptively. Firstly, by solving the inflection point of the pixel level curve in the gray histogram of the original image, the background threshold is set, and then the background of the image is obtained; Secondly, pixels are sampled from the background and calculated to get the gray gap among different regions of the image; Ultimately, the gray gap is compensated. With this method, an experiment is carried out to adjust 96 dual-channel images from testing a fused silica sample with aperture 180mm×120mm. The results show that the gray gap of the images on different channel is reduced from 3.64 to 0.70 grayscale on average. This method can be also applied to other CCD mosaic camera.

A high-bandwidth driving circuit of FSM (fast-steering mirror) is designed and presented in this paper. The circuit plays an important role in FSM controlling system of the ATP (acquisition, tracking and pointing) system for laser communications. In order to achieve higher bandwidth, smaller size and stability, piezoelectric ceramics and linear power amplifier driving methods are adopted. In the design of the driving circuit, OPA228 and PA93 are selected to constitute bipolar amplification structure to obtain the optimization and balance of magnification and bandwidth. A pre-amplifier is used to achieve a lower input offset voltage and higher bandwidth; a post amplifier to obtain the characteristics of high power and high pressure. In this paper, the working principle and design process of the driving circuit has been described in details and the factors affecting the bandwidth of the circuit are analyzed. Simulations of the driving circuit are validated by using TINA and the experimental results are in agreement with the theoretical analysis.

A novel adaptive optics vision simulator (AOVS) is presented and characterized for several design features, including automated measuring and compensating eye’s aberrations up to the fifth order, which fully cover aberrations typically found in the human eye, even for the cases of highly aberrated eyes. Especially, it is equipped with 35 elements bimorph deformable mirror with bigger stroke and smaller size, which could help establish near-diffraction-limited ocular optics condition. To investigate the validity of this apparatus, pilot data under different aberration correction pattern from one subjects are collected, and contrast sensitivity function (CSF), an important psychophysical function in vision, is obtained also. Results from living eyes show a practically perfect aberration correction and demonstrate the utility of this system.

In some professional image application fields, we need to test some key parameters of the CMOS camera and evaluate the performance of the device. Aiming at this requirement, this paper proposes a perfect test method to evaluate the CMOS camera. Considering that the CMOS camera has a big fixed pattern noise, the method proposes the ‘photon transfer curve method’ based on pixels to measure the gain and the read noise of the camera. The advantage of this method is that it can effectively wipe out the error brought by the response nonlinearity. Then the reason of photoelectric response nonlinearity of CMOS camera is theoretically analyzed, and the calculation formula of CMOS camera response nonlinearity is deduced. Finally, we use the proposed test method to test the CMOS camera of 2560*2048 pixels. In addition, we analyze the validity and the feasibility of this method.

As lithography still pushing toward to lower k􀬵 imaging, traditional illumination source shapes may perform marginally in resolving complex layouts, freeform source shapes are expected to achieve better image quality. Illumination optimization as one of inverse lithography techniques attempts to synthesize the input source which leads to the desired output wafer pattern by inverting the forward model from mask to wafer. This paper proposes a method to optimize illumination by using simulated annealing algorithms (SA). A synthesis of the NILS values at multi-critical mask locations over a focus range is chose as the merit function. The advantage of the SA algorithm is that it can identify optimum source solutions without any additional apriori knowledge about lithographic processes. The results show that our method can provide great improvements in both image quality and DOF.

Infrared characteristics of the target show some surface features of targets. By analyzing the infrared characteristics of the targets, specific properties and working condition of targets can be obtained. By studying the methods of the infrared properties of the targets, we can get a method of extracting the target surface characteristics. Actual spectral irradiance is calculated according to the dimension reduction and target’s infrared signal. Optimization model can be obtained by matching the theoretical formula of target’s irradiance with actual spectral irradiance. Equivalent temperature and equivalent area of target can be calculated by optimization methods.

Compared with the conventional adaptive optics (AO) system, the sensorless AO system can greatly reduce the complexity of system. The slow convergence speed is the biggest defect of this type of system because the existing sensorless adaptive optics systems mostly use various blind optimization algorithms as the control algorithm of the system. This paper presents a closed-loop control algorithm based on model for the sensorless AO system. An adaptive optics system simulation platform is established with a 61-element deformable mirror and a CCD imaging device. The convergence speed and the correction capability are investigated through correcting wavefront aberrations, which conform to Kolmogrov spectrum and are composed of 102 orders Zernike mode. Results are compared to those of SPGD (Stochastic parallel gradient descent), the most commonly used control algorithm for sensoress AO systems. Research results show that both algorithms can obtain the correction capability getting close to the best effect of 61-element deformable mirror. The model-based sensorless AO system requires 103 times measurement of the far field spot, but the SPGD-based sensorless AO system needs about 1500 times. Therefore, the control algorithm provided can greatly improve the convergence speed of sensorless AO systems.

This paper proposes a kind of ballistic range spatial benchmark control system, which is based on the Position Sensitive Detector (PSD) and multidimensional stepper motor console. The method— how to control a stepper motor automatic implement space benchmark according to the position of light spot on the PSD is also given. Besides, the camera stations in ballistic range have been calibrated by the spatial benchmark devices. Experimental results show that PSD-based spatial benchmark system can effectively eliminate errors caused by the artificial operation between different stations, and its spatial precision is superior to 0.1mm.