Heat transfer improvement in quasi-monolithic integration technology

Mojtaba Joodaki; Guenter Kompa; Hartmut H. Hillmer; Rainer Kassing

doi:10.1117/1.2008968

1 July 2005 Heat transfer improvement in quasi-monolithic integration technology

Mojtaba Joodaki, Guenter Kompa, Hartmut H. Hillmer, Rainer Kassing

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 4, Issue 3, 033011 (July 2005). https://doi.org/10.1117/1.2008968

Abstract

Static thermal analyses for the earlier concept and the enhanced quasi-monolithic integration technology (QMIT) are performed in detail. The effects of several parameters such as the properties of the materials involved and different geometries in all possible structures are described. Simulation results confirm a very low thermal resistance for the enhanced QMIT structure and highlight its superiority to the earlier concept of QMIT structures. This leads to a longer lifetime, a higher reliability and a better performance of the packaging.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Mojtaba Joodaki, Guenter Kompa, Hartmut H. Hillmer, and Rainer Kassing "Heat transfer improvement in quasi-monolithic integration technology," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(3), 033011 (1 July 2005). https://doi.org/10.1117/1.2008968

Published: 1 July 2005

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