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Dr. Cathy Perry Sullivan
Technical Marketing Manager
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Publications (4)
Proceedings Article | 14 December 2009 Paper
Immersion and dry lithography monitoring for flash memories (after develop inspection and photo cell monitor) using a darkfield imaging inspector with advanced binning technology
P. Parisi, A. Mani, C. Perry-Sullivan, J. Kopp, G. Simpson, M. Renis, M. Padovani, C. Severgnini, P. Piacentini, P. Piazza, A. Beccalli
Proceedings Volume 7520, 75201W (2009) https://doi.org/10.1117/12.835839
KEYWORDS: Inspection, Semiconducting wafers, Phase modulation, Critical dimension metrology, Immersion lithography, Lithography, Defect detection, Scanners, Defect inspection, Imaging systems
Proceedings Article | 1 December 2008 Paper
Advanced technology for after-develop inspection
Z. Y. Chen, I. C. Chou, J. H. Yang, Wallas Chen, Josh Chang, Henry Chen, Melvin Ng, Meng-Che Wu, Cathy Perry-Sullivan, Mingwei Li
Proceedings Volume 7140, 71400Y (2008) https://doi.org/10.1117/12.804661
KEYWORDS: Inspection, Wafer-level optics, Signal to noise ratio, Deep ultraviolet, Semiconducting wafers, Metals, Optics manufacturing, Defect inspection, Optical lithography, Optical inspection
Proceedings Article | 10 June 1996 Paper
Thermal difference reflectance spectroscopy of high-Tc superconductors
Matthew Holcomb, Catherine Perry, James Collman, William Little
Proceedings Volume 2696, (1996) https://doi.org/10.1117/12.241769
KEYWORDS: Superconductors, Temperature metrology, Scattering, Reflectivity, Plasma, Superconductivity, Optical properties, Thin films, Reflectance spectroscopy, Copper
Proceedings Article | 10 June 1996 Paper
Experimental studies of the high-temperature superconducting cuprates using thermal difference reflectance spectroscopy
Catherine Perry, Matthew Holcomb, James Collman, William Little
Proceedings Volume 2696, (1996) https://doi.org/10.1117/12.241808
KEYWORDS: Superconductors, Temperature metrology, Reflectivity, Indium, Metals, Spectroscopy, Silver, Reflectance spectroscopy, Superconductivity, Thin films
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