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Edwin de Jong
at ASML Netherlands B.V.
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Publications (1)
Proceedings Article | 10 April 2024 Presentation
ArFi speckle reduction and impact on local CDU
Will Conley, Stephen Hsu, Michael Crouse, Dylan Martin, Rajasekhar Rao, Natalllia Karlitskaya, Dirk van Leuken, Jan Baselmans, Marieke van Veen, Edwin de Jong, Birgitt Hepp, Rasmus Nielsen, Eric Bakker
Proceedings Volume PC12953, PC129530D (2024) https://doi.org/10.1117/12.3010892
KEYWORDS: Speckle, Pulsed laser operation, Line width roughness, Semiconducting wafers, Laser scanners, Simulations, Red lasers, Modulation, Edge roughness, Data processing
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