Dr. Mohsen Nasseri Profile

Dr. Mohsen Nasseri

at IBM

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper

From lab to fab: in-line SIMS for process control in semiconductor manufacturing

Stefan Schoeche, Katherine Sieg, Daniel Schmidt, Mohsen Nasseri, Shogo Mochizuki, Marinus Hopstaken, Yaguang Zhu, Li Xiang, Julia Hoffman, Daniel Lewellyn, Paul Isbester, Sarah Okada

Proceedings Volume 12955, 1295508 (2024) https://doi.org/10.1117/12.3011666

KEYWORDS: Semiconducting wafers, Silicon, Epitaxy, Germanium, Nanosheets, Metrology, Annealing, Diffusion, Transistors

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years