Dr. Shogo Mochizuki Profile

Dr. Shogo Mochizuki

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Proceedings Article | 10 April 2024 Presentation + Paper

From lab to fab: in-line SIMS for process control in semiconductor manufacturing

Stefan Schoeche, Katherine Sieg, Daniel Schmidt, Mohsen Nasseri, Shogo Mochizuki, Marinus Hopstaken, Yaguang Zhu, Li Xiang, Julia Hoffman, Daniel Lewellyn, Paul Isbester, Sarah Okada

Proceedings Volume 12955, 1295508 (2024) https://doi.org/10.1117/12.3011666

KEYWORDS: Semiconducting wafers, Silicon, Epitaxy, Germanium, Nanosheets, Metrology, Annealing, Diffusion, Transistors

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