Prof. Shiyuan Liu
Professor at Huazhong Univ of Science and Technology
SPIE Involvement:
Author
Area of Expertise:
Optical Lithography , Optical Metrology , Nanometrology and Instrumentation , Nanomanufacturing
Websites:
Profile Summary

Professor Shiyuan Liu received his PhD in Mechanical Engineering from Huazhong University of Science and Technology in 1998, and worked as a Visiting Scholar at University of Manchester, UK, from 2000 to 2001. Then he served as a Director of Control Engineering Department at National Lithography Tool Research and Development Center in Shanghai from 2002 to 2005. He became a Professor of Mechanical Engineering at Huazhong University of Science and Technology in 2005, and now leads his Nanoscale and Optical Metrology Group, doing research on the metrology and instrumentation for nanomanufacturing. He also works in the area of optical lithography including wavefront aberration metrology and computational lithography technology. He is a member of SPIE, OSA, AVS, IEEE, and CSMNT (Chinese Society of Micro/Nano Technology). He holds 30 patents and has authored or co-authored more than 100 technical papers. Please visit http://www2.hust.edu.cn/nom for more detailed information.
Publications (45)

Proceedings Article | 30 April 2024 Paper
Yong Sun, Zhongyu Wang, Jing Min, Xiuguo Chen, Zirong Tang, Shiyuan Liu
Proceedings Volume 13154, 1315408 (2024) https://doi.org/10.1117/12.3016208
KEYWORDS: Doping, Ion implantation, Statistical modeling, Reflectivity, Reflection, Chemical elements, Silicon, Laser irradiation, Diffusion, Temperature metrology

Proceedings Article | 18 December 2023 Paper
Proceedings Volume 12963, 129630B (2023) https://doi.org/10.1117/12.3003704
KEYWORDS: Signal to noise ratio, Diffraction, Background noise, Interference (communication), Denoising, Analog to digital converters, Analog electronics, Photons, Electrons, Education and training

Proceedings Article | 24 November 2023 Paper
Tianjuan Yang, Xiuguo Chen, Jiahao Zhang, Shuo Liu, Shiyuan Liu
Proceedings Volume 12935, 1293557 (2023) https://doi.org/10.1117/12.3008281
KEYWORDS: Condition numbers, Matrices, Measurement uncertainty, X-rays, Metrology, Critical dimension metrology, Inverse problems, Error analysis, Scattering

Proceedings Article | 23 January 2023 Paper
Chuangchuang Chen, Yu Zhou, Wenjie Li, Li Liu, Honggang Gu, Shiyuan Liu
Proceedings Volume 12557, 125571G (2023) https://doi.org/10.1117/12.2651662
KEYWORDS: Extreme ultraviolet, Photomasks, Diffraction, Defect inspection, Extreme ultraviolet lithography, Sensors, Scattering, Transistors, Image retrieval

Proceedings Article | 19 November 2021 Paper
Proceedings Volume 12059, 120591M (2021) https://doi.org/10.1117/12.2612769
KEYWORDS: Data modeling, Statistical modeling, Scattering, Diffraction, X-rays, Scatterometry, Convolution, Inverse problems, Metrology, Optics manufacturing

Showing 5 of 45 publications
Conference Committee Involvement (3)
Nondestructive Characterization and Monitoring of Advanced Materials, Aerospace, Civil Infrastructure, and Transportation XIII
4 March 2019 | Denver, Colorado, United States
Nondestructive Characterization and Monitoring of Advanced Materials, Aerospace, Civil Infrastructure, and Transportation XII
5 March 2018 | Denver, Colorado, United States
Nondestructive Characterization and Monitoring of Advanced Materials, Aerospace, Civil Infrastructure, and Transportation XI
26 March 2017 | Portland, Oregon, United States
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