Dr. Ute Natura
at Hellma Materials GmbH
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 31 December 2009 Paper
Proceedings Volume 7504, 75041P (2009) https://doi.org/10.1117/12.836409
KEYWORDS: Laser scattering, Scattering, Absorption, Refractive index, Annealing, Mie scattering, Air contamination, Crystals, Calcium, Laser crystals

Proceedings Article | 31 December 2009 Paper
Stephan Rix, Ute Natura, Martin Letz, Claudia Felser, Lutz Parthier
Proceedings Volume 7504, 75040J (2009) https://doi.org/10.1117/12.836404
KEYWORDS: Diffusion, Calcium, Ions, Laser induced damage, Crystals, Phonons, Fluorine, Deep ultraviolet, Silver, Laser irradiation

Proceedings Article | 30 December 2008 Paper
Proceedings Volume 7132, 71321Q (2008) https://doi.org/10.1117/12.804474
KEYWORDS: Laser induced fluorescence, Silica, Absorption, Luminescence, Fusion energy, Raman spectroscopy, Excimer lasers, Laser irradiation, Laser damage threshold, Laser scattering

Proceedings Article | 30 December 2008 Paper
Proceedings Volume 7132, 71321G (2008) https://doi.org/10.1117/12.804286
KEYWORDS: Absorption, Silica, Temperature metrology, Laser irradiation, Laser induced damage, Hydrogen, Lithography, Deep ultraviolet, Annealing, Excimer lasers

Proceedings Article | 20 December 2007 Paper
Alfons Burkert, Dietmar Keutel, Ute Natura
Proceedings Volume 6720, 67201K (2007) https://doi.org/10.1117/12.752813
KEYWORDS: Laser induced fluorescence, Absorption, Crystals, Excimer lasers, Laser crystals, Laser applications, Luminescence, Polishing, Light scattering, Optical components

Proceedings Article | 26 March 2007 Paper
Proceedings Volume 6520, 652030 (2007) https://doi.org/10.1117/12.712108
KEYWORDS: Polarization, Crystals, Temperature metrology, Laser crystals, Excimer lasers, Laser optics, Birefringence, Calcium, Laser irradiation, Optical properties

Proceedings Article | 31 August 2005 Paper
Proceedings Volume 5878, 58780E (2005) https://doi.org/10.1117/12.616904
KEYWORDS: Absorption, Scattering, Laser induced fluorescence, Laser scattering, Laser irradiation, Laser stabilization, Excimers, Light scattering, Luminescence, Excimer lasers

Proceedings Article | 12 May 2005 Paper
Ute Natura, Rolf Martin, Gordon von der Goenna, Michael Kahlke, Gabriele Fasold
Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.599319
KEYWORDS: Absorption, Data modeling, Statistical modeling, Excimer lasers, Hydrogen, Silica, Optical properties, Annealing, Optical lithography, Silver

Proceedings Article | 21 February 2005 Paper
Proceedings Volume 5647, (2005) https://doi.org/10.1117/12.585247
KEYWORDS: Optical lithography, Silver, Lithography, Semiconductors, Semiconductor lasers, Laser applications, Lenses, Immersion lithography, Laser induced damage, Biological research

Proceedings Article | 10 June 2004 Paper
Ute Natura, Oliver Sohr, Rolf Martin, Michael Kahlke, Gabriele Fasold
Proceedings Volume 5273, (2004) https://doi.org/10.1117/12.521739
KEYWORDS: Hydrogen, Absorption, Silica, Refraction, Data modeling, Excimer lasers, Raman spectroscopy, Silicon, Laser irradiation, Refractive index

Proceedings Article | 28 May 2004 Paper
Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.536666
KEYWORDS: Ions, Crystals, Absorption, Deep ultraviolet, Distortion, Electron holes, Optical properties, Chemical species, Glasses, Temperature metrology

Proceedings Article | 28 May 2004 Paper
Ute Natura, Oliver Sohr, Martin Letz, Rolf Martin, Michael Kahlke, Gabriele Fasold
Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.531653
KEYWORDS: Hydrogen, Excimer lasers, Silica, Absorption, Silicon, Data modeling, Statistical modeling, Optical lithography, Raman spectroscopy, Systems modeling

Proceedings Article | 4 November 2003 Paper
Christian Muehlig, Siegfried Kufert, Wolfgang Triebel, Ute Natura, Frank Coriand
Proceedings Volume 5188, (2003) https://doi.org/10.1117/12.506795
KEYWORDS: Absorption, Silica, Laser induced damage, Calcium, Lithography, Excimer lasers, Deep ultraviolet, Laser irradiation, Optical testing, Optical lithography

Showing 5 of 13 publications
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