Dr. Christian Mühlig Profile

Dr. Christian Mühlig

Sr Researcher at Fraunhofer IOF

SPIE Involvement:

Author

Publications (44)

Proceedings Article | 18 June 2024 Presentation

Surface and thin film characterization using angle resolved light scattering: from roughness and defect analysis to in-situ coating inspection

Anne-Sophie Munser, Tobias Herffurth, Christian Mühlig, Thomas Gischkat, Sven Schröder

Proceedings Volume PC13020, PC130200W (2024) https://doi.org/10.1117/12.3029579

KEYWORDS: Light scattering, Optical surfaces, Coating, Thin film coatings, Thin films, Surface finishing, Inspection, Sensors, Laser scattering, Fabrication

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Proceedings Article | 18 June 2024 Presentation

Accurate measurement and reduction of losses in ion beam sputtering coatings

Alex Ribeaud, Jürgen Pistner, Isabel Vela-Perez, Julien Lumeau, Lauernt Gallais, Rico Benz, Christoph Sturzenegger, Bernd Eiermann, Christian Mühlig

Proceedings Volume 13020, 130200P (2024) https://doi.org/10.1117/12.3023035

KEYWORDS: Thin film coatings, Optical coatings, Sputter deposition, Ion beams, Laser scattering, Visible radiation, Thin films, Thermography, Near ultraviolet, Light absorption

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Proceedings Article | 24 November 2023 Poster

Comprehensive optical loss characterization of ultra-high reflecting mirror: energy balance measurements

Christian Mühlig, Tobias Herffurth, Simon Bublitz

Proceedings Volume PC12726, PC1272610 (2023) https://doi.org/10.1117/12.2685166

KEYWORDS: Mirrors, Reflection, Spherical lenses, Scattered light, Light scattering, Light absorption, Laser scattering, Laser induced damage

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Proceedings Article | 24 November 2023 Presentation + Paper

Study of high-performance IBS coatings for near-IR laser applications

Alex Ribeaud, Jürgen Pistner, Mathias Soulier, Julien Lumeau, Laurent Gallais, Rico Benz, Christoph Sturzenegger, Bernd Eiermann, Christian Mühlig, Thomas Gischkat, Sven Schröder

Proceedings Volume 12726, 1272605 (2023) https://doi.org/10.1117/12.2685243

KEYWORDS: Optical coatings, Laser scattering, Laser applications, Light absorption, Thin film coatings, Sputter deposition, Ion beams, Absorption, Visible radiation, Thin films

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Proceedings Article | 3 December 2022 Poster + Presentation

Nonlinear absorption in TiO2 and HfO2 thin films

Christian Mühlig, Simon Bublitz, Benjamin Rudolph, Olaf Stenzel, Steffen Wilbrandt

Proceedings Volume PC12300, PC1230010 (2022) https://doi.org/10.1117/12.2642985

KEYWORDS: Absorption, Titanium dioxide, Thin films, Laser induced damage

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Proceedings Article | 2 December 2022 Poster + Presentation + Paper

Non-destructive testing of subsurface damage for early indication of laser-induced damage threshold in fused silica

Anne-Sophie Munser, Marcus Trost, Christian Mühlig, Nora Tadewaldt, Stefan Kuhn, Luisa Coriand, Ulf Hallmeyer

Proceedings Volume 12300, 123000K (2022) https://doi.org/10.1117/12.2642749

KEYWORDS: Light scattering, Scattering, Polishing, Nondestructive evaluation, Absorption, Laser induced damage, Etching, Surface finishing, Silica, Statistical analysis

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SPIE Journal Paper | 30 October 2018

Characterization of nonlinear optical crystal absorption

Christian Mühlig, Simon Bublitz

OE, Vol. 57, Issue 12, 121907, (October 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.12.121907

KEYWORDS: Absorption, Nonlinear crystals, Calibration, Crystals, Laser induced damage, Laser beam diagnostics, Aluminum, Ferroelectric materials, Optical engineering, Optical testing

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Proceedings Article | 11 December 2017 Paper

Bulk absorption properties of LBO crystals

Ch. Mühlig, S. Bublitz

Proceedings Volume 10447, 104471N (2017) https://doi.org/10.1117/12.2280454

KEYWORDS: Absorption, Crystals, Laser induced damage, Calibration, Laser beam diagnostics, Nonlinear crystals, Manufacturing, Laser crystals, Photonic crystals, Fiber lasers

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Proceedings Article | 6 December 2016 Paper

Characterization of NLO crystal absorption for wavelengths 1 to 4

Ch. Mühlig, S. Bublitz

Proceedings Volume 10014, 100141N (2016) https://doi.org/10.1117/12.2245023

KEYWORDS: Absorption, Nonlinear crystals, Calibration, Laser induced damage, Aluminum, Laser beam diagnostics, Crystals, Laser crystals, Ferroelectric materials, Ytterbium

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SPIE Journal Paper | 18 July 2016

Direct absorption measurements in thin rods and optical fibers

Christian Mühlig, Simon Bublitz, Martin Lorenz

OE, Vol. 56, Issue 01, 011006, (July 2016) https://doi.org/10.1117/12.10.1117/1.OE.56.1.011006

KEYWORDS: Glasses, Absorption, Laser induced damage, Optical fibers, Calibration, Fiber Bragg gratings, Signal detection, Refractive index, Optical engineering, Continuous wave operation

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Proceedings Article | 23 November 2015 Paper

Direct absorption measurements in thin rods and optical fibers

Christian Mühlig, Simon Bublitz, Martin Lorenz

Proceedings Volume 9632, 96321Q (2015) https://doi.org/10.1117/12.2192579

KEYWORDS: Absorption, Optical fibers, Rods, Laser induced damage, Fiber lasers, Laser processing, Fiber characterization, Spectrometers, Calibration, Optics manufacturing, Glasses, Signal detection, Fiber Bragg gratings, Laser drilling, Silica

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SPIE Journal Paper | 11 August 2014

Accelerated lifetime testing of fused silica for deep ultraviolet laser applications revised

Christian Mühlig, Simon Bublitz

OE, Vol. 53, Issue 12, 122508, (August 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.12.122508

KEYWORDS: Absorption, Silica, Deep ultraviolet, Luminescence, Laser applications, Temperature metrology, Annealing, Laser irradiation, Manufacturing, Hydrogen

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Proceedings Article | 14 November 2013 Paper

Accelerated life time testing of fused silica for DUV laser applications revised

Christian Mühlig, Simon Bublitz

Proceedings Volume 8885, 88851O (2013) https://doi.org/10.1117/12.2030315

KEYWORDS: Absorption, Silica, Luminescence, Temperature metrology, Deep ultraviolet, Laser induced fluorescence, Accelerated life testing, Laser applications, Laser induced damage, Laser irradiation

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Proceedings Article | 4 December 2012 Paper

Sandwich concept: enhancement for direct absorption measurements by laser-induced deflection (LID) technique

Ch. Mühlig, S. Bublitz, W. Paa

Proceedings Volume 8530, 85301X (2012) https://doi.org/10.1117/12.976853

KEYWORDS: Absorption, Laser induced damage, Laser beam diagnostics, Laser crystals, Polishing, Silica, Crystals, Laser irradiation, Neodymium lasers, Calibration

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SPIE Journal Paper | 14 September 2012

Sensitive and absolute absorption measurements in optical materials and coatings by laser-induced deflection technique

Christian Mühlig, Simon Bublitz

OE, Vol. 51, Issue 12, 121812, (September 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.12.121812

KEYWORDS: Absorption, Calibration, Laser induced damage, Optical coatings, Laser beam diagnostics, Optical testing, Silica, Laser irradiation, Thin films, Crystals

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Proceedings Article | 12 January 2012 Paper

Direct and absolute absorption measurements in optical materials and coatings by laser-induced deflection (LID) technique

Ch. Mühlig

Proceedings Volume 8206, 82061I (2012) https://doi.org/10.1117/12.909884

KEYWORDS: Absorption, Laser induced damage, Calibration, Laser beam diagnostics, Silica, Crystals, Laser crystals, Antireflective coatings, Manufacturing, Thin films

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Proceedings Article | 28 November 2011 Paper

Comparative study of fused silica materials for ArF laser applications

Ch. Mühlig, S. Bublitz, H. Bernitzki

Proceedings Volume 8190, 81901Q (2011) https://doi.org/10.1117/12.899063

KEYWORDS: Absorption, Silica, Refractive index, Laser irradiation, Laser induced fluorescence, Laser induced damage, Laser applications, Phase measurement, Interferometers, Luminescence

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Proceedings Article | 23 November 2011 Paper

Characterization of optical materials and coatings for high-power NIR/VIS laser application

Ch. Mühlig, S. Bublitz, W. Paa

Proceedings Volume 8190, 819016 (2011) https://doi.org/10.1117/12.899172

KEYWORDS: Absorption, Calibration, Laser induced damage, Laser beam diagnostics, Antireflective coatings, Silica, High power lasers, Crystals, Optical coatings, Spectroscopy

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Proceedings Article | 27 May 2011 Paper

Spectrally resolved measurement of small optical losses by cavity enhanced spectroscopy techniques

T. Zeuner, W. Paa, G. Schmidl, Ch. Mühlig

Proceedings Volume 8082, 808243 (2011) https://doi.org/10.1117/12.889419

KEYWORDS: Mirrors, Reflectivity, Absorption, Spectroscopy, Laser induced damage, Optical testing, Laser scattering, Sensors, Avalanche photodetectors, Scattering

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Proceedings Article | 27 May 2011 Paper

Laser induced deflection (LID) method for absolute absorption measurements of optical materials and thin films

Christian Mühlig, Simon Bublitz, Wolfgang Paa

Proceedings Volume 8082, 808225 (2011) https://doi.org/10.1117/12.889468

KEYWORDS: Absorption, Silica, Laser induced damage, Calibration, Laser beam diagnostics, Thin films, Raw materials, Optical fibers, Antireflective coatings, Ytterbium

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Proceedings Article | 11 February 2011 Paper

New developments in high power fiber lasers based on alternative materials

Andreas Langner, Mario Such, Gerhard Schötz, Stephan Grimm, Florian Just, Martin Leich, Christian Mühlig, Jens Kobelke, Anka Schwuchow, Oliver Mehl, Olaf Strauch, Roman Niedrig, Björn Wedel, Georg Rehmann, Volker Krause

Proceedings Volume 7914, 79141U (2011) https://doi.org/10.1117/12.876978

KEYWORDS: Fiber lasers, Silica, Cladding, Signal attenuation, Refractive index, Absorption, Laser induced damage, Doping, Ytterbium, Laser development

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Proceedings Article | 29 November 2010 Paper

Characterization of preform raw materials for high power fiber lasers using LID absorption measurement technique

Ch. Mühlig, S. Bublitz, St. Grimm, A. Langner, G. Schötz

Proceedings Volume 7842, 78421M (2010) https://doi.org/10.1117/12.867230

KEYWORDS: Absorption, Raw materials, Laser induced damage, Fiber lasers, Silica, Calibration, Scattering, Signal attenuation, Laser scattering, Manufacturing

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Proceedings Article | 29 November 2010 Paper

Population kinetics of the fluorescing MNa center state in CaF2 upon fs laser excitation at 392 nm and 262 nm

C. Karras, C. Mühlig, W. Paa, H. Stafast, W. Triebel, T. Zeuner

Proceedings Volume 7842, 78421R (2010) https://doi.org/10.1117/12.867256

KEYWORDS: Femtosecond phenomena, Luminescence, Ultraviolet radiation, Pulsed laser operation, Near infrared, Sodium, Picosecond phenomena, Fine needle aspiration, Absorption, Optical simulations

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Proceedings Article | 31 December 2009 Paper

Influence of Na-related defects on DUV nonlinear absorption in CaF2: nanosecond versus femtosecond laser pulses

Ch. Mühlig, H. Stafast, W. Triebel, Th. Zeuner, Ch. Karras, M. Letz

Proceedings Volume 7504, 75040I (2009) https://doi.org/10.1117/12.836354

KEYWORDS: Absorption, Sodium, Pulsed laser operation, Luminescence, Femtosecond phenomena, Solar thermal energy, Fine needle aspiration, Annealing, Deep ultraviolet, Excitons

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Proceedings Article | 30 December 2008 Paper

Laser-induced deflection (LID) technique for thermal lens evaluation and direct absorption measurements

Ch. Mühlig, A. Bochmann, W. Triebel, S. Kufert

Proceedings Volume 7132, 71320R (2008) https://doi.org/10.1117/12.804284

KEYWORDS: Absorption, Laser induced damage, Laser beam diagnostics, Silica, Coating, Calibration, Refractive index, Numerical simulations, Optical coatings, Near infrared

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Proceedings Article | 30 December 2008 Paper

Accelerated life time testing of fused silica upon ArF laser irradiation

Ch. Mühlig, W. Triebel, S. Kufert, U. Natura

Proceedings Volume 7132, 71321G (2008) https://doi.org/10.1117/12.804286

KEYWORDS: Absorption, Silica, Temperature metrology, Laser irradiation, Laser induced damage, Hydrogen, Lithography, Deep ultraviolet, Annealing, Excimer lasers

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We report on two approaches to strongly shorten life time testing of fused silica's absoption degradation upon 193 nm laser irradiation. Both approaches are based on enhancing the two photon absorption (TPA) induced generation of E' and NBOH defects centers in fused silica compared to common marathon test irradiation parameters. For the first approach the irradiation fluence is increased from typical values H<1 mJ/cm² to H=10 mJ/cm², therefore increasing the peak laser power for a more efficient TPA process. To avoid microchannel formation in the samples, being a common break-down criterion in marathon tests based on transmission measurements, a small sample of 10 mm length is irradiated and the absorption is measured directly by the laser induced deflection (LID) technique. For comparing the experimental results with a real marathon test at H=1.3 mJ/cm², an experimental grade sample with very low hydrogen content, i.e. fast absorption changes due to reduced defect annealing, is choosen. During the fluence dependent absorption measurements after the prolonged irradiation at H=10 mJ/cm² it is found, that both experiments reveal very comparable absorption data for H=1.3 mJ/cm². For investigating standard material with high hydrogen content, i.e. slow absorption increase due to effective defect annealing, a sample is cooled down to -180 °C in a special designed experimental setup and irradiated at a laser fluence H=10 mJ/cm². To control the increase of the defect density and to determine the end of the TPA induced defect generation, the fluorescence at 650 nm of the generated NBOH centers is monitored. Before and after the low temperature experiment, the absorption coefficient is measured directly by LID technique. By applying both, elevated laser fluence and low temperature, the ArF laser induced generation of E' and NBOH centers in the investigated sample is terminated after about 1.2*10⁷ laser pulses. Therefore, a strong reduction of irradiation time is achieved in comparison to about 10¹⁰ pulses required in common marathon test applications.

Proceedings Article | 26 September 2008 Paper

Laser induced fluorescence and absorption measurements for DUV optical thin film characterization

Ch. Mühlig, W. Triebel, S. Kufert, S. Bublitz

Proceedings Volume 7101, 71011R (2008) https://doi.org/10.1117/12.797676

KEYWORDS: Absorption, Luminescence, Laser induced fluorescence, Raw materials, Laser induced damage, Magnesium fluoride, Thin films, Thin film coatings, Optical coatings, Deep ultraviolet

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Proceedings Article | 25 September 2008 Paper

Characterization of high reflecting coatings and optical materials by direct absorption and cavity ring down measurements

Ch. Mühlig, G. Schmidl, J. Bergmann, W. Triebel

Proceedings Volume 7102, 71020T (2008) https://doi.org/10.1117/12.797679

KEYWORDS: Absorption, Reflectivity, Laser induced damage, Mirrors, Silica, Optical coatings, Pulsed laser operation, Laser scattering, Scattering, Laser beam diagnostics

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Proceedings Article | 20 December 2007 Paper

Measurement of initial absorption of fused silica at 193nm using laser induced deflection technique (LID)

Dörte Schönfeld, Ursula Klett, Christian Mühlig, Stephan Thomas

Proceedings Volume 6720, 67201A (2007) https://doi.org/10.1117/12.753081

KEYWORDS: Absorption, Laser induced damage, Silica, Calibration, Scattering, Refractive index, Spectroscopy, Optical lithography, Temperature metrology, Light scattering

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Proceedings Article | 15 January 2007 Paper

Direct measurements of residual absorption in fluoridic thin films and optical materials for DUV laser applications

Ch. Mühlig, W. Triebel, S. Kufert, Ch. Noppeney, H. Bernitzki

Proceedings Volume 6403, 640317 (2007) https://doi.org/10.1117/12.695438

KEYWORDS: Absorption, Laser induced damage, Laser beam diagnostics, Light scattering, Calibration, Silica, Laser scattering, Optical coatings, Scattering, Laser irradiation

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Proceedings Article | 20 October 2005 Paper

Application of the laser-induced deflection (LID) technique for low absorption measurements in bulk materials and coatings

W. Triebel, C. Mühlig, S. Kufert

Proceedings Volume 5965, 59651J (2005) https://doi.org/10.1117/12.625083

KEYWORDS: Absorption, Laser induced damage, Laser beam diagnostics, Silica, Calibration, Refractive index, Surface finishing, Laser irradiation, Optical coatings, Temperature metrology

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Proceedings Article | 5 October 2005 Paper

Absorption and fluorescence measurements of DUV/VUV coatings

Ch. Mühlig, W. Triebel, H. Bernitzki, M. Klaus, J. Bergmann, S. Kufert, S. Bublitz

Proceedings Volume 5963, 59630P (2005) https://doi.org/10.1117/12.625079

KEYWORDS: Absorption, Laser induced fluorescence, Mirrors, Laser induced damage, Luminescence, Praseodymium, Cerium, Laser irradiation, Thin films, Laser applications

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Proceedings Article | 31 August 2005 Paper

Investigating the ArF laser stability of CaF2 at elevated fluences

A. Burkert, Ch. Muehlig, W. Triebel, D. Keutel, U. Natura, L. Parthier, S. Gliech, S. Schroeder, A. Duparre

Proceedings Volume 5878, 58780E (2005) https://doi.org/10.1117/12.616904

KEYWORDS: Absorption, Scattering, Laser induced fluorescence, Laser scattering, Laser irradiation, Laser stabilization, Excimers, Light scattering, Luminescence, Excimer lasers

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Proceedings Article | 21 February 2005 Paper

Analysis of laser durability of CaF2 for optical lithography

Guenter Grabosch, Lutz Parthier, Ute Natura, Karin Poehl, Martin Letz, Christian Muehlig, Konrad Knapp

Proceedings Volume 5647, (2005) https://doi.org/10.1117/12.585247

KEYWORDS: Optical lithography, Silver, Lithography, Semiconductors, Semiconductor lasers, Laser applications, Lenses, Immersion lithography, Laser induced damage, Biological research

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Proceedings Article | 10 September 2004 Paper

Bulk absorption measurements of highly transparent DUV/VUV optical materials

Christian Muhlig, Siegfried Kufert, Wolfgang Triebel, Frank Coriand, Lutz Parthier, Andreas Voitsch

Proceedings Volume 5457, (2004) https://doi.org/10.1117/12.545601

KEYWORDS: Absorption, Laser induced damage, Silica, Calcium, Luminescence, Laser irradiation, Laser induced fluorescence, Excimer lasers, Oxygen, Laser beam diagnostics

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Proceedings Article | 4 November 2003 Paper

Absorption measurement of DUV optical materials at 193 and 157 nm by laser-induced deflection

Christian Muehlig, Siegfried Kufert, Wolfgang Triebel, Ute Natura, Frank Coriand

Proceedings Volume 5188, (2003) https://doi.org/10.1117/12.506795

KEYWORDS: Absorption, Silica, Laser induced damage, Calcium, Lithography, Excimer lasers, Deep ultraviolet, Laser irradiation, Optical testing, Optical lithography

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Proceedings Article | 4 November 2003 Paper

Laser-induced fluorescence of calcium fluoride at 193 and 157 nm excitation

Christian Muehlig, Wolfgang Triebel, Gabriela Toepfer, Joachim Bergmann, Sven Brueckner, Christoph Chojetzki, Regina Martin

Proceedings Volume 5188, (2003) https://doi.org/10.1117/12.506787

KEYWORDS: Laser induced fluorescence, Luminescence, Calcium, Fluorine, Laser irradiation, Solar thermal energy, Absorption, Pulsed laser operation, Excitons, Annealing

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Proceedings Article | 30 May 2003 Paper

Luminescence of UV thin films

Joerg Heber, Christian Muehlig, Wolfgang Triebel, Norbert Danz, Roland Thielsch, Norbert Kaiser

Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.472391

KEYWORDS: Luminescence, Thin films, Coating, Aluminum, Ultraviolet radiation, Multilayers, Mirrors, Laser induced fluorescence, Color centers, Silica

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Proceedings Article | 30 May 2003 Paper

Calcium fluoride for ArF laser lithography: characterization by in-situ transmission and LIF measurements

Christian Muehlig, Wolfgang Triebel, Gabriela Toepfer, A. Jordanov

Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.473181

KEYWORDS: Luminescence, Laser induced fluorescence, Solar thermal energy, Laser irradiation, Absorption, Laser scattering, Crystals, Pulsed laser operation, Lithography, Excimer lasers

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Proceedings Article | 11 November 2002 Paper

Simultaneous measurement of bulk absorption and fluorescence in fused silica upon ArF laser irradiation

Christian Muhlig, Siegfried Kufert, Wolfgang Triebel, Frank Coriand

Proceedings Volume 4779, (2002) https://doi.org/10.1117/12.453730

KEYWORDS: Absorption, Silica, Luminescence, Laser induced fluorescence, Laser induced damage, Laser irradiation, Oxygen, Pulsed laser operation, Single photon, Excimer lasers

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Proceedings Article | 10 December 2001 Paper

Measuring small absorption losses of laser pulses in fused silica by a pump and probe technique

Christian Muehlig, Siegfried Kufert, Sylvia Bark-Zollmann, Wolfgang Triebel

Proceedings Volume 4449, (2001) https://doi.org/10.1117/12.450100

KEYWORDS: Absorption, Silica, Laser beam diagnostics, Excimer lasers, Laser induced damage, Pulsed laser operation, Calibration, Laser irradiation, Beam splitters, Ultraviolet radiation

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Proceedings Article | 11 October 2000 Paper

Evaluation of fused silica for DUV laser application by short-time diagnostics

Wolfgang Triebel, Sylvia Bark-Zollmann, Christian Muehlig, Andreas Voitsch, Frank Coriand, Jochen Alkemper

Proceedings Volume 4103, (2000) https://doi.org/10.1117/12.403569

KEYWORDS: Laser induced fluorescence, Silica, Raman spectroscopy, Absorption, Excimer lasers, Luminescence, Laser induced damage, Pulsed laser operation, Deep ultraviolet, Laser applications

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Proceedings Article | 5 July 2000 Paper

Dynamic change of transmission of CaF2 single crystals by irradiating with ArF excimer laser light

Jochen Alkemper, Joerg Kandler, Lorenz Strenge, Ewald Moersen, Christian Muehlig, Wolfgang Triebel

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.389004

KEYWORDS: Absorption, Excimer lasers, Crystals, Laser crystals, Luminescence, Materials processing, Fluorine, Resistance, Raw materials, Optical lithography

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Proceedings Article | 5 July 2000 Paper

Pulsed UV laser Raman and fluorescence spectroscopy of large-area fused silica photomask substrates

Christian Muehlig, Sylvia Bark-Zollmann, Dieter Grebner, Wolfgang Triebel

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.389054

KEYWORDS: Silica, Raman spectroscopy, Laser induced fluorescence, Photomasks, Pulsed laser operation, Ultraviolet radiation, Excimer lasers, Luminescence, Hydrogen, Fluorescence spectroscopy

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Showing 5 of 44 publications

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